Honeycomb Drying Block for FOSB Moisture Control

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Solution Overview

Problem

Conventional drying methods in the semiconductor industry fail to effectively control moisture inside the Front Opening Shipping Box (FOSB) due to the structural limitations of current driers, which leads to corrosion of wafer contacts from fluorine ion residues and moisture-induced bonding pad corrosion.

Innovation Solution

A drying block structure with a honeycomb main body and a porous protective layer, designed to fit inside the FOSB, featuring a recess and plate-shaped element for enhanced moisture absorption and automation, allowing direct integration within the storage device to control relative humidity and prevent corrosion.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a conventional drier is disposed outside the FOSB, then the drier can be easily attached using automatic packing machine, but the moisture inside the FOSB cannot be absorbed as expected

Engineering Contradiction:

Improveease of attachmentVSAvoidmoisture absorption effectiveness

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The drying block is placed inside the FOSB container, nesting the drying function within the storage structure itself. This allows the drier to be positioned where it can directly absorb moisture from the wafer storage environment, resolving the contradiction by achieving both effective moisture absorption and automated handling through internal placement

Inventive Principle:

Principle #7Nested doll (Nesting)

2Reliability

If the drier is disposed inside the FOSB, then moisture absorption effectiveness is improved, but structural limitations prevent current driers from being directly disposed in the FOSB

Engineering Contradiction:

Improvemoisture absorption effectivenessVSAvoidstructural compatibility

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The drying block utilizes porous material structure to provide high surface area for moisture absorption while maintaining a compact form factor that fits within the FOSB structural constraints. The porous architecture enables effective moisture absorption without requiring the bulky structure of conventional driers

Inventive Principle:

Principle #31Porous materials

Solution Approach 2:

The drying block employs composite material construction combining porous absorbing material with a structural housing, creating a component that simultaneously achieves effective moisture absorption and mechanical compatibility with the FOSB container structure and automated handling requirements

Inventive Principle:

Principle #40Composite materials

3Productivity

If conventional drying methods are used, then the manufacturing process can be maintained, but corrosion occurs due to moisture and fluorine ion residues

Engineering Contradiction:

Improvemanufacturing process continuityVSAvoidcorrosion damage

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The drying block is placed in the FOSB before wafer storage to preemptively control the moisture environment. This preliminary action creates a low-humidity environment that prevents corrosion from occurring in the first place, rather than attempting to address corrosion after it happens

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The drying block creates a low-humidity inert-like environment within the FOSB that chemically isolates the wafers from moisture and fluorine ion residues, preventing the chemical reactions that cause corrosion while maintaining manufacturing process continuity

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The integrated drying block structure effectively absorbs moisture, reducing relative humidity and preventing corrosion, thereby improving wafer storage conditions and enabling automated handling and reuse, thus enhancing product yield and operational efficiency.

Implementation Method 1

the material of the main body includes porous material... effectively absorbs moisture, reducing relative humidity

Methodology Applied

Scientific EffectAbsorption: Absorption (physical)

Implementation Method 2

a protective layer covering the main body and having a porous structure... effectively absorbs moisture

Methodology Applied

Scientific EffectPorous structure absorption: Porosity

Data Source

PatentUS11651982B2Drying block structure and storage device

Publication Date: 2023.05.16 WINBOND ELECTRONICS CORP

AI summary

A drying block structure is provided, including a main body and a protective layer. The main body has a honeycomb and substantially circular shape. The protective layer covers the main body and has a porous structure. The main body and the protective layer are integrally formed as one piece.