Horizontal Array Stocker for Semiconductor Wafer Handling
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Solution Overview
Problem
Conventional automated material handling systems for semiconductor fabrication require large, heavy robots with significant vertical motion, leading to increased costs, space requirements, and limited speed, as they typically use vertical arrays of storage shelves and complex support structures.
Innovation Solution
A horizontal array stocker is implemented, supported from the ceiling or floor, utilizing a gantry robot for minimal vertical motion and increased input/output ports, allowing for efficient storage and transport of wafer containers with reduced footprint and enhanced buffering capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If a vertical array of storage shelves is used with a multi-axis robot, then storage capacity is increased, but the robot mass and vertical range of motion increase significantly
Solution Approach 1:
The patent transitions from a vertical array configuration to a horizontal array configuration, changing the primary dimension of storage organization. This allows the robot to operate primarily in the horizontal plane with minimal vertical motion, dramatically reducing robot mass requirements while maintaining storage capacity through extended horizontal reach
2Quantity of substance
If a vertical array of storage shelves is used, then storage capacity is increased, but the vertical range of motion required increases
Solution Approach 1:
The patent reorganizes storage from a vertical stacking arrangement to a horizontal array arrangement, moving the robot's primary operation to the horizontal plane. This eliminates the need for large vertical travel while maintaining storage capacity through extended horizontal positioning capability
3Stability of the object's composition
If a heavy robot base and shelf structures are mounted on the clean room floor, then stability is improved, but the clean room floor space required increases
Solution Approach 1:
The patent moves the stocker system from floor-mounted to ceiling-supported installation. This relocates the system to the vertical space above the tool bay, eliminating floor space consumption while maintaining structural stability through overhead support from the facility ceiling
4Quantity of substance
If a large mass robot is used to access vertical shelves, then storage capacity is increased, but the speed of the robot is limited
Solution Approach 1:
The patent reconfigures the system to operate primarily in the horizontal plane where the robot can move more quickly without the constraints of large vertical acceleration and deceleration. This horizontal array configuration with minimal vertical motion enables faster operation while maintaining storage capacity
Data Source
AI summary
The present invention comprises a stocker. The stocker comprises multiple container storage locations arranged in a horizontal array. The horizontal array of storage locations may be suspended from the facility ceiling or supported by the facility floor. The stocker may include one or more stocker robots for transporting a workpiece container within the stocker and/or to a material transport system. The stocker may also include features such as container elevators and conveyor loops.