Horizontal Attenuated Total Reflection Prism for Ellipsometer Sample Handling
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Solution Overview
Problem
Existing spectroscopic ellipsometer and polarimeter systems lack the application of Horizontal Attenuated Total Reflection (HATR) systems, which do not require liquid samples to be confined in cells, making it inconvenient to apply HATR systems in these setups.
Innovation Solution
The implementation of a method using a source of spectroscopic electromagnetic radiation, a first reflecting means, and a triangular or trapezoidal shaped element with a horizontally oriented surface, where the sample affects the reflection characteristics, allowing for the evaluation of fluid or solid samples without the need for cells, utilizing a polarization state generator and detector to analyze the changes in reflection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If vertically oriented liquid containing cells are used in Spectroscopic Ellipsometer Systems, then the system can measure changes in Polarization State, but the system requires complex cell structures and inconvenient sample handling
Solution Approach 1:
The patent inverts the conventional vertical orientation of the prism to a horizontal orientation. This inversion allows liquid samples to be placed directly on the horizontal upper surface of the prism without requiring complex cell structures, thereby simplifying the device while maintaining measurement capability
Solution Approach 2:
The patent extracts the liquid containment function from a separate cell structure and integrates it directly onto the prism surface. By making the prism surface itself the sample holding surface, the system eliminates the need for additional cell components, reducing device complexity
2Ease of operation
If HATR systems are applied in Spectroscopic Ellipsometer Systems, then liquid samples do not need to be confined in cells, but the system lacks proper beam path control and polarization analysis
Solution Approach 1:
The patent makes the horizontal prism serve multiple functions: it acts as both the sample holding surface and the optical element for total internal reflection. The same horizontal surface that holds the liquid sample also provides the interface for evanescent wave interaction, eliminating the need for separate containment and optical components
Solution Approach 2:
The patent introduces a carefully designed beam path with mirrors and polarizing components that mediate between the simple horizontal prism and the detection system. This intermediary beam path enables precise polarization control and analysis while maintaining the simplicity of the sample interface
3Ease of operation
If horizontal surfaces are used for sample placement, then samples can remain in place without cell confinement, but the reflection characteristics may be affected by gravitational flow
Solution Approach 1:
The patent employs a thin film or meniscus configuration of the liquid sample on the horizontal prism surface. The surface tension and adhesion forces in this thin film configuration prevent gravitational flow while allowing the sample to remain in place on the horizontal surface without cell confinement
Solution Approach 2:
The patent transitions from vertical to horizontal orientation, changing the dimensional configuration of the sample-prism interface. This dimensional change allows gravity to act perpendicular to the optical path rather than parallel to it, preventing gravitational flow from affecting the sample position at the measurement interface
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the characterization of fluid or solid samples by analyzing the changes in reflection characteristics, providing a more convenient and effective method for investigating optical properties without the need for cell confinement.
Implementation Method 1
reflect from a second surface thereof, the plane of which second surface is oriented substantially horizontally
Implementation Method 2
a first reflecting means, a triangular shaped prism... a second reflective means
Data Source
AI summary
Horizontally oriented attenuated total reflection (HATR) system applied in spectroscopic ellipsometer or polarimeter systems, and methodology of use.