Horizontal Electro-Forming Apparatus for Uniform Invar Alloy Plating

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Solution Overview

Problem

The existing vertical electro-forming method for producing Invar alloy masks for OLED display devices faces challenges with non-uniform current density and plating layer thickness, limiting the scalability and productivity of large-scale OLED manufacturing due to the need for larger plating baths and increased manufacturing costs.

Innovation Solution

A horizontal electro-forming apparatus is developed, featuring a plating bath with a clamp system to grasp the substrate, an anode assembly with optimized distance and plating solution supply, and a driving unit for uniform current distribution, allowing for larger substrate processing without the need for extensive installation space and ensuring uniform plating layer thickness.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If vertical electro-forming method is used, then plating can be performed on substrate, but current density becomes non-uniform and plating layer thickness becomes non-uniform as plating area increases

Engineering Contradiction:
Improveplating layer thickness uniformityVSAvoidplating bath size
Core Design Contradiction:
Manufacturing precisionVSArea of stationary object

Solution Approach 1:

The patent inverts the conventional vertical electro-forming configuration by placing the substrate horizontally at the bottom of the plating bath and positioning the anode above it. This inversion allows the anode to be positioned at an optimized distance from the substrate surface, enabling uniform current density distribution across large-area substrates and producing uniformly thick plating layers without requiring excessively large plating baths.

Inventive Principle:
Principle #13The other way round (Inversion)

Solution Approach 2:

The patent transitions from vertical electro-forming to horizontal electro-forming, changing the spatial dimension of the plating process. By positioning the substrate horizontally and the anode above it in the vertical dimension, the system achieves better current density uniformity across the substrate surface area, resolving the contradiction between plating area and thickness uniformity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Productivity

If plating bath size is increased to accommodate larger substrates, then large-scale OLED manufacturing is enabled, but installation space requirement increases and productivity decreases

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidplating bath volume
Core Design Contradiction:
ProductivityVSVolume of stationary object

Solution Approach 1:

By inverting the electro-forming configuration to horizontal orientation with the anode positioned above the substrate, the patent achieves uniform plating on large substrates without requiring proportionally larger plating baths. This enables large-scale OLED manufacturing with controlled installation space requirements and maintains high productivity.

Inventive Principle:
Principle #13The other way round (Inversion)

3Ease of manufacture

If cold-rolling process is used to produce thin Invar plates, then thin masks can be manufactured, but manufacturing process becomes long and complicated with high cost

Engineering Contradiction:
Improvemanufacturing process simplicityVSAvoidplate thickness control
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent replaces the mechanical cold-rolling process with electro-forming, an electrochemical process that directly deposits Invar alloy onto the substrate. This substitution eliminates the need for multi-stage rolling operations, simplifies the manufacturing process, reduces cost, and enables precise control of plate thickness through electrochemical parameters.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent uses electro-forming to control plate thickness by adjusting electrochemical parameters such as current density, plating time, and electrolyte composition, rather than relying on mechanical rolling parameters. This enables precise thickness control with a simplified single-step process.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The horizontal electro-forming method enhances productivity by reducing the size of the plating bath, maintaining uniform current density and plating layer thickness, and improving the yield of large-scale OLED display devices, thus lowering manufacturing costs.

Implementation Method 1

an anode and a cathode are disposed in parallel facing each other in an inside space of a plating bath and a substrate to be plated is disposed between the anode and the cathode. After a plating solution (an electrolyte) is supplied into the inside space of the plating bath, the anode and the cathode are connected to an anode power supply and a cathode power supply, respectively. Then, when a current is applied thereto, a plating layer (an Invar alloy) is formed on one surface of the substrate.

Methodology Applied
Scientific EffectElectro-forming: Electrodeposition

Data Source

PatentUS11530489B2Apparatus for electro-forming and apparatus for horizontal electro-forming
Publication Date: 2022.12.20 LG DISPLAY CO LTD
  • US11530489B2 patent drawing
  • US11530489B2 patent drawing
  • US11530489B2 patent drawing

AI summary

Provided is an apparatus for electro-forming. The apparatus for electro-forming includes a plating bath which is a space where a substrate is plated and a clamp disposed within the plating bath and configured to grasp the substrate disposed in a horizontal direction. The apparatus for electro-forming further includes an assembly including an anode spaced above the substrate and connected to an external power supply and a plating solution supply unit spaced above the substrate and configured to supply a plating solution. The apparatus for electro-forming also includes a driving unit configured to reciprocate the assembly in a horizontal direction at a distance from the substrate. The assembly further includes an insulator between the anode and the plating solution supply unit.