Horizontal Programmable Conducting Bridges for Post-Fabrication Circuit Modification

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Solution Overview

Problem

Conventional microelectronic circuits face limitations in modifying circuit elements after microfabrication, requiring constant power to keep added circuit elements on or off and necessitating new photomasks for connections or changes, which is costly and slows down throughput.

Innovation Solution

Incorporating programmable horizontal bridges made of phase-changeable materials that can be switched between conductive and non-conductive states using current patterns, allowing for dynamic connection or disconnection of circuit elements after microfabrication without the need for new photomasks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If conventional photomasks are used for circuit modifications, then circuit connections can be established, but manufacturing cost increases and throughput decreases

Engineering Contradiction:
Improvecircuit modifiabilityVSAvoidmanufacturing throughput
Core Design Contradiction:
Adaptability or versatilityVSProductivity

Solution Approach 1:

The patent changes the physical state of the phase-change material (from crystalline to amorphous phase) to alter its electrical conductivity. By delivering specific current patterns that generate controlled thermal effects, the material transitions between conductive and non-conductive states, enabling circuit modifications without photomasks and maintaining high manufacturing throughput

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent replaces the mechanical photomask system with an electrical programming system. Instead of using physical masks to define circuit connections, the invention uses electrical current patterns to program phase-change materials, which then establish or break circuit connections electronically, eliminating the need for costly and time-consuming photomask fabrication and alignment processes

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Reliability

If constant power is supplied to keep circuit elements on or off, then circuit functionality is maintained, but energy consumption increases

Engineering Contradiction:
Improvecircuit state stabilityVSAvoidoperational power
Core Design Contradiction:
ReliabilityVSUse of energy by moving object

Solution Approach 1:

The phase-change material serves itself by maintaining its programmed state (conductive or non-conductive) without requiring continuous external power. Once programmed through a brief current pulse that induces phase transition, the material retains its state through its inherent physical properties, eliminating the need for constant power supply to maintain circuit connections and significantly reducing operational energy consumption

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent utilizes phase transitions of the phase-change material between crystalline and amorphous states to store circuit configuration information. These phase states are thermodynamically stable and maintain themselves without continuous energy input, allowing circuit elements to remain in their programmed on/off states without constant power, thus improving reliability while reducing energy consumption

Inventive Principle:
Principle #36Phase transitions

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables flexible and efficient changes to circuit design functionality by allowing circuit blocks to be turned on or off independently of power status, reducing operational power requirements and simplifying the manufacturing process.

Implementation Method 1

The phase changeable material can be changed from conducting to non-conducting after microfabrication by using a pattern of current delivered to the phase changeable material

Methodology Applied
Scientific EffectPhase change: Phase Change

Implementation Method 2

by using a pattern of current delivered to the phase changeable material

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS11640937B2Horizontal programmable conducting bridges between conductive lines
Publication Date: 2023.05.02 TOKYO ELECTRON LTD
  • US11640937B2 patent drawing
  • US11640937B2 patent drawing
  • US11640937B2 patent drawing

AI summary

In a method for forming a semiconductor device, a plurality of conductive lines is formed as a part of a first wiring level of the semiconductor device. The first wiring level is positioned over a first level having a plurality of transistor devices. The plurality of conductive lines extends parallel to the first level. In addition, a programmable horizontal bridge is formed that extends parallel to the first level, and electrically connects a first conductive line and a second conductive line of the plurality of conductive lines in the first wiring level. The programmable horizontal bridge is formed based on a programmable material that changes phase between a conductive state and a non-conductive state according to a current pattern delivered to the programmable horizontal bridge.