Horizontal Scan Platen Assembly for Compact Ion Beam Processing
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Solution Overview
Problem
Existing semiconductor processing systems have a high number of complex components and occupy significant space due to the need for multiple robots and vertical scanning mechanisms, which increases costs and complexity.
Innovation Solution
A semiconductor processing system utilizing a horizontal scan mechanism with magnetic levitation, incorporating a movable platen assembly within an enclosure that moves horizontally via a linear motor, eliminating the need for air bearings and dedicated robots by using a central distribution robot to transfer workpieces directly between load locks and process chambers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If a vertical scan mechanism with air bearing and movable shaft is used, then the platen can be positioned at different elevations for processing, but the device complexity and number of components increases
Solution Approach 1:
The patent extracts and eliminates the air bearing and movable shaft components from the system. Instead of using a vertical scan mechanism with these components, the invention uses a horizontal scan approach where the platen moves horizontally on a fixed shaft, thereby removing the complex air bearing system while maintaining the essential functionality of platen positioning for processing
Solution Approach 2:
The patent inverts the traditional vertical scan approach by implementing a horizontal scan mechanism. Instead of moving the platen vertically to position it for processing, the platen moves horizontally while the ion beam is directed downward, achieving the same processing capability with a different orientation that eliminates the need for air bearings
2Reliability
If dedicated robots are used in each process chamber, then workpiece transfer is reliable, but the device complexity and space occupation increases
Solution Approach 1:
The patent implements a universal central distribution robot that serves multiple process chambers instead of having dedicated robots for each chamber. This single robot performs the workpiece transfer function for all chambers, reducing the total number of robots from N (one per chamber) to 1, while maintaining reliable workpiece transfer through centralized control
Solution Approach 2:
The patent merges the functions of multiple dedicated robots into a single central distribution robot. By combining the workpiece transfer capabilities into one robot located in the distribution hub, the system reduces component count and simplifies the overall architecture while maintaining the essential function of reliable workpiece delivery to each process chamber
3Adaptability or versatility
If a rotatable platen on movable shaft with air bearing is used, then vertical positioning is achieved, but the system occupies more space and has more complex components
Solution Approach 1:
The patent inverts the positioning approach by eliminating vertical movement of the platen and instead achieving processing positioning through horizontal movement. The platen remains on a fixed shaft and moves horizontally, with the ion beam directed downward, thereby eliminating the need for vertical scan mechanisms and air bearings that would occupy significant space
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces the number of components and overall size of the cluster tool, minimizing space usage and eliminating issues associated with air bearings, while maintaining efficient processing capabilities.
Implementation Method 1
The movable platen assembly and the tracks serve as a linear motor, which allows the movable platen assembly to move while levitating
Implementation Method 2
The movable platen assembly moves horizontally within the enclosure. In some embodiments, the process chamber comprises a linear motor to move the movable platen assembly horizontally
Implementation Method 3
an ion source, configured such that an ion beam extracted from the ion source is directed downward
Data Source
AI summary
A process chamber that includes an ion source that directs the ion beam downward is disclosed. The platen is disposed on a movable platen assembly within an enclosure. The movable platen assembly moves horizontally to allow the ion beam to process a workpiece disposed on the platen. The process chamber includes tracks disposed on the bottom surface of the enclosure. The movable platen assembly and the tracks serve as a linear motor, which allows the movable platen assembly to move while levitating. A cluster tool that utilizes a plurality of these process chambers is also disclosed. The cluster tool also includes a front-end system and a distribution hub, wherein a central distribution robot transfers workpieces between a load lock and a platen in one of the process chambers.