Horizontal Solution Feeder Arrangement for Substrate Treatment
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Solution Overview
Problem
In substrate treatment apparatuses with multiple stacked solution treatment modules, foreign substances can contaminate the treatment solution, leading to defects on substrates during or before treatment, as filters are not effectively positioned to prevent contamination across different stages.
Innovation Solution
A solution supply unit with supply pipelines and solution feeders, including pumps and filters, is arranged adjacent to each solution treatment module, ensuring filtered treatment solutions are pressure-fed and reducing contamination by minimizing the distance and head difference between the filter and discharge nozzle across all modules.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If filters are positioned far from discharge nozzles in stacked solution treatment modules, then device complexity is reduced, but foreign substances contaminate the treatment solution causing substrate defects
Solution Approach 1:
The patent transitions from vertical stacking (head difference in vertical direction) to horizontal arrangement (adjacent positioning in horizontal direction). By placing solution feeders horizontally adjacent to solution treatment modules rather than vertically above/below, the discharge distance is minimized while maintaining modular stackability. This dimensional change resolves the contradiction by achieving both low complexity and high reliability.
Solution Approach 2:
The patent applies different spatial configurations to different components: solution feeders are positioned horizontally adjacent to their corresponding solution treatment modules for minimal discharge distance, while the modules themselves maintain vertical stacking for compactness. This localized optimization of component positioning achieves both defect suppression and space efficiency.
2Productivity
If solution treatment modules are stacked at multiple stages to improve space utilization, then productivity increases, but foreign substance contamination risk increases due to longer discharge distances
Solution Approach 1:
The patent repositions solution feeders from vertical alignment (creating long discharge paths in stacked modules) to horizontal alignment (creating short discharge paths). This allows multiple stages to be stacked vertically for high productivity while each stage maintains short horizontal discharge distances to prevent contamination.
Solution Approach 2:
The patent divides the solution supply system into independent solution feeders for each solution treatment module, with each feeder horizontally adjacent to its corresponding module. This segmentation ensures that each module has its own dedicated filtered solution supply with minimal discharge distance, enabling multi-stage stacking without cross-contamination risks.
3Reliability
If solution feeders are arranged horizontally adjacent to solution treatment modules, then filtration effectiveness improves by minimizing discharge distance, but device complexity increases
Solution Approach 1:
The patent combines the solution feeder and solution treatment module into integrated units where the feeder is horizontally adjacent to the module it serves. This merging approach minimizes the number of intermediate connections and reduces overall system complexity while achieving superior filtration effectiveness through minimized discharge distance.
Solution Approach 2:
The patent designs a universal module configuration where each solution treatment module can be paired with a solution feeder in the same horizontal arrangement pattern. This standardized, multi-functional design reduces the need for custom configurations and simplifies the overall device architecture while maintaining high filtration effectiveness across all modules.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration suppresses defects across all solution treatment modules by ensuring consistent and filtered treatment solution delivery, improving defect performance and reducing the risk of contamination, while allowing for efficient module operation and cost-effective design.
Implementation Method 1
a pump configured to pressure-feed the treatment solution to the corresponding solution treatment module
Implementation Method 2
a filter configured to filtrate the treatment solution
Data Source
AI summary
A substrate treatment apparatus includes: a plurality of solution treatment modules stacked at multiple stages, each configured to perform a treatment using a treatment solution on a substrate; and a solution supply unit configured to supply the treatment solution to the plurality of solution treatment modules, wherein: the solution supply unit includes supply pipelines provided with a solution feeder corresponding to the solution treatment modules; and the solution feeder includes a pump configured to pressure-feed the treatment solution to the corresponding solution treatment module and a filter configured to filtrate the treatment solution, and is arranged adjacent to the corresponding solution treatment module in a horizontal direction.