Hot Filament CVD Device Multi-Workpiece Coating
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Solution Overview
Problem
Existing hot filament CVD devices face challenges in efficiently coating multiple base materials, particularly heavy objects like cemented carbide tools, due to the complexity and time required for preparing multiple base materials within a cylindrical heating region.
Innovation Solution
A hot filament CVD device design that includes a chamber with a movable stage and support blocks allowing multiple base materials to be easily positioned inside, along with a filament electrode unit with interchangeable cartridges, enabling efficient alignment and heating of multiple filaments to form a diamond thin film on multiple workpieces simultaneously.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If multiple base materials are disposed inside a cylindrical heating region formed by a single filament stretched around struts, then coating treatment can be performed, but it is difficult to dispose multiple base materials and a large amount of time is required for preparatory work
Solution Approach 1:
The patent divides the heating system into multiple independent filaments (first filament and second filament) instead of using a single filament. Each filament can be independently controlled and positioned, allowing multiple base materials to be simultaneously heated and coated without complex preparation work. This segmentation enables parallel processing of multiple workpieces.
Solution Approach 2:
The patent transitions from a single cylindrical heating region to a multi-dimensional heating arrangement with filaments positioned at different locations and orientations. The first and second filaments are disposed at different positions relative to the base materials, creating a more flexible three-dimensional heating zone that can accommodate multiple workpieces simultaneously.
2Loss of time
If multiple base materials are disposed inside a cylindrical heating region, then coating treatment can be performed, but a large amount of time is required for preparatory work for disposing heavy objects
Solution Approach 1:
By segmenting the heating system into multiple independent filaments, the patent enables simultaneous heating of multiple base materials without requiring sequential positioning and adjustment, significantly reducing preparatory work time for heavy objects.
Solution Approach 2:
The multiple filaments serve universal heating functions for different base materials simultaneously. Each filament can independently heat different workpieces, making the system multi-functional and eliminating the need for reconfiguration when processing different heavy objects.
3Productivity
If a single filament is stretched around struts to form a heating region, then a cylindrical heating zone is created, but multiple base materials cannot be easily disposed for improving coating treatment efficiency
Solution Approach 1:
The heating system is segmented into multiple filaments with independent support structures. Instead of one complex cylindrical filament arrangement, multiple simpler filament structures are used, each capable of independently heating base materials, thereby improving productivity without excessive structural complexity.
Solution Approach 2:
The patent moves from a single two-dimensional cylindrical heating zone to a three-dimensional multi-filament heating arrangement, adding spatial dimensions to the heating capability. This enables multiple base materials to be positioned at different locations and heated simultaneously, improving coating treatment efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables rapid and efficient coating of multiple base materials by allowing easy insertion and positioning of workpieces relative to the filaments, improving coating treatment efficiency and reducing preparation time, especially for heavy objects like drill blades.
Implementation Method 1
a mixed gas of hydrocarbons (methane) and hydrogen is preheated by a filament heated to 1000 degrees or more, and the heated gas is introduced into the surface of the substrate to deposit diamond due to thermal decomposition of the hydrocarbons
Implementation Method 2
a hot filament CVD device that forms a coating film on a base material
Data Source
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AI summary
Provided is a hot filament CVD device capable of easily disposing multiple base materials in a chamber. A hot filament CVD device (1) includes a chamber (2), multiple filaments, multiple base material supports (4) supporting respective multiple base materials (5), and a table (31). The multiple base material supports (4) can be inserted into the chamber (2) in a predetermined insertion direction through an opening (2H), and support the corresponding multiple base materials (5) so that the multiple base materials (5) are disposed at intervals in the insertion direction. The table (31) has a mounting surface on which the multiple base material supports (4) are allowed to be mounted allowing the multiple base materials (5) to be disposed facing the corresponding multiple filaments, and supports the multiple base material supports (4) inside the chamber (2) while allowing the multiple base material supports (4) to be disposed adjacent to each other in a chamber width direction.