Hot Water Cart Conditioning with Heated-Water Cycling for UF Filters
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Solution Overview
Problem
Conventional methods for conditioning ultrafiltration (UF) filter modules in semiconductor fabrication require extensive time, often taking weeks, and are not efficient in removing particles and total organic carbon (TOC) to achieve semiconductor-grade water quality.
Innovation Solution
A conditioning system and method using a heat exchanger, magnetically levitated pump, and controller to cycle heated and ambient temperature water through the filter module, with sensors and a programmable controller to control temperature and flow rate, achieving rapid and precise conditioning of UF modules to produce semiconductor-grade water.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If conventional conditioning methods are used for UF filter modules, then the filter modules can be conditioned, but the process takes extensive time (weeks) and is not efficient
Solution Approach 1:
The system implements periodic cycling between heated water (170-190°F) and ambient temperature water to condition the filter module. This alternating thermal action accelerates the removal of particles and TOC compared to conventional single-temperature methods, reducing conditioning time from weeks to a few days while achieving semiconductor-grade water quality
Solution Approach 2:
The system changes water temperature parameters dynamically during the conditioning process. By cycling between high temperature (170-190°F) and ambient temperature, the system optimizes contaminant removal efficiency at different stages, significantly improving productivity while reducing total conditioning time
2Manufacturing precision
If heated water is used to condition the filter module, then contaminant removal is improved, but thermal shock may damage the filter module
Solution Approach 1:
The system uses periodic cycling between heated water (170-190°F) and ambient temperature water. This alternating approach allows gradual thermal adaptation of the filter module while maintaining effective contaminant removal, preventing thermal shock damage while achieving semiconductor-grade water quality with particles less than 10 nm and TOC less than 1 ppb
Solution Approach 2:
The system prepares for thermal shock prevention by alternating between heated and ambient temperature water. The ambient temperature flushing cycles act as cushioning periods that allow the filter module to gradually adapt to temperature changes, protecting against thermal shock while maintaining conditioning effectiveness
3Reliability
If corrosion resistant materials are used throughout the system, then water quality is maintained, but system complexity and cost increase
Solution Approach 1:
The system applies corrosion resistant materials selectively only where water contact occurs (heat exchanger interior, pump interior, channel interior, sensor contact surfaces) while using standard materials for structural and non-contact components. This localized approach maintains water quality stability (particles <10 nm, TOC <1 ppb) while reducing overall system complexity and cost
4Manufacturing precision
If a magnetically levitated pump is used, then particle generation is minimized, but device complexity increases
Solution Approach 1:
The system replaces conventional mechanical pumps that generate particles through contact and friction with a magnetically levitated pump. The magnetic levitation eliminates mechanical contact between moving parts, preventing particle generation while maintaining the necessary pumping function for cycling water through the filter module at controlled flow rates
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system enables rapid conditioning of UF modules in a few days, reducing contaminants to less than 10 nm particles and 1 ppb TOC, compatible with existing systems, and maintaining high water quality without thermal shock.
Implementation Method 1
a heat exchanger lined with a first corrosion resistant material positioned downstream from the inlet
Implementation Method 2
a magnetically levitated pump in fluid communication with the heat exchanger
Data Source
AI summary
A conditioning system for a filter module is disclosed. The conditioning system may generally include an inlet, a heat exchanger, a magnetically levitated pump, a channel provided to bypass the heat exchanger, a controller, an outlet, and a base. The system may have components lined with corrosion-resistant materials. A method of conditioning a filter module is also disclosed. The method may generally include measuring TOC in a source of ultrapure water, heating the ultrapure water, rinsing a filter module with the heated water, flushing the filter module with ambient temperature water, and repeating the rinsing with heated water and flushing with ambient temperature water. A method of facilitating conditioning of the filter module is also disclosed. The method may generally include providing a portable filter module conditioning system and providing instructions for installation or use.