Submillimeter Hot-Wire Sensor Residual Stress Compensation

The patent applies composite materials by creating a multilayer metal wire structure consisting of alternating layers with positive and negative residual stresses. This composite construction allows the wire to maintain mechanical strength while compensating for residual stress-induced curvature, thereby preserving measurement precision at high speeds.

The patent changes the physical parameters of the metal wire by controlling the thickness and residual stress characteristics of individual layers. By adjusting layer thicknesses to specific ranges (e.g., 0.05-2.0 μm for certain layers), the overall wire achieves both sufficient mechanical strength and minimal curvature for precise measurements.

The patent uses composite materials by combining multiple metal layers with complementary residual stress properties. This allows the wire to achieve both thin overall dimensions (for precision) and sufficient mechanical strength through the synergistic effect of layers with opposing stresses that prevent deformation at high speeds.

The patent applies the counterweight principle by incorporating layers with negative residual stress to counterbalance layers with positive residual stress. This internal stress compensation allows the thin metal wire to maintain mechanical integrity at high speeds while remaining thin enough for precise measurements.

The patent applies segmentation by separating the sensor into distinct functional components: a substrate with fabrication features, extendable support structures, and the metal wire sensor element. This modular design allows the support length to be adjusted independently while maintaining manufacturing simplicity through standardized fabrication processes.

The patent implements dynamics by designing support structures with extendable features that allow the sensor to be positioned at variable distances from the wall. This dynamic positioning capability enables the same sensor design to be used in multiple flow measurement locations without sacrificing manufacturing simplicity.