HP Pulse Generator Control Using Shared Galvanic Isolation
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Solution Overview
Problem
High-power generators used in plasma processes face high costs and reliability issues due to the need for galvanic isolation of multiple switching elements, which increases the risk of failure and complexity.
Innovation Solution
A high-power generator system with a control unit that combines, distributing unit, and/or method of supplying a plasma process with high power pulses having varying amplitudes, comprising a combining unit, a distributing unit, and a control unit, where the control unit drives switching elements with a combining unit and distributing unit to achieve galvanic isolation, reducing costs and improving reliability by controlling switching elements at different times and distributing control signals.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If galvanic isolation is implemented for every switching element or switching element group, then control signal isolation is achieved, but costs increase and reliability decreases due to many parts with failure risk
Solution Approach 1:
The patent combines multiple control signals into a single isolated signal path. Instead of isolating each control signal separately, the invention merges the control signals and uses a single galvanic isolation barrier, thereby reducing the number of isolation components while maintaining proper signal isolation between high-voltage and low-voltage sides.
Solution Approach 2:
The patent implements a universal control approach where a single isolated control signal can serve multiple switching elements. The control unit generates one isolated control signal that is then distributed to multiple switching elements, making the isolation mechanism multi-functional rather than requiring dedicated isolation for each element.
2Reliability
If multiple galvanically isolated control signals are used for switching elements, then proper control isolation is achieved, but costs increase due to multiple isolation components
Solution Approach 1:
The patent merges multiple control signals into a single isolated signal path. Instead of isolating each control signal separately, the invention combines the control functions and uses a single galvanic isolation barrier, thereby reducing the number of isolation components while maintaining proper signal isolation between high-voltage and low-voltage sides.
Solution Approach 2:
The patent implements a universal control approach where a single isolated control signal can serve multiple switching elements. The control unit generates one isolated control signal that is then distributed to multiple switching elements, making the isolation mechanism multi-functional rather than requiring dedicated isolation for each element.
Data Source
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AI summary
HP-generator (10) configured to deliver pulsed high-power (HP) with a high value of voltage and/or high current to a load, in particular to a plasma process, the HP-generator comprising: a. several switching elements (51, 52) connected in a way to have different potential basis, configured to form high-power-pulses by switching the switching elements on and off, at least some of them at different predetermined times, b. a control unit (22) configured to drive the switching elements comprising: i) a combining unit (201) with several combining-unit-input-connections (202, 203, 204) and a combining-unit-output-connection (207), the combining unit configured to combine several input-control-signals (252, 253, 254), ii) a distributing unit (211) with a distributing-unit-input-connection (217) and several distributing-unit-output-connections (212, 213, 214), the distributing unit configured to distribute the one transceiver-signal (255) at the distributing-unit-input-connection, and iii) one galvanic isolating transceiver-element (221) for several control signals, each relating to the switching on and off of the switching elements at the predetermined times, the galvanic isolating transceiver-element connected to the combining-unit-output-connection (207) and the distributing-unit-input-connection (217).