Humidifier Airflow Plate Layout to Prevent Condensation Spikes
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Air conditioners used in photolithography processes face humidity spikes due to vapor condensation on metal plates with air through holes, leading to instability in air humidity control.
Innovation Solution
An air conditioner design featuring a humidifier with a storage tank and heater, combined with a moisture absorption member positioned above the storage tank to prevent dew condensation around air through holes, ensuring stable air humidity control by absorbing vapor before it condenses and combines with air.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a metal plate with air through hole is installed in downstream opening of air flow path, then air flow is directed downward through the through hole, but vapor condenses on wall surface around the through hole and combines with air causing humidity spike
Solution Approach 1:
A moisture absorption member (intermediary substance) is introduced between the vapor source and the air flow path. This intermediary absorbs excess vapor before it can condense on the plate wall surface and contaminate the downward air flow, thus preventing humidity spikes while maintaining the air flow direction control function
Solution Approach 2:
The harmful vapor is extracted and removed from the air flow path by the moisture absorption member. By placing the moisture absorption member above the plate, vapor is captured and absorbed before it reaches the condensation zone around the air through hole, eliminating the humidity instability problem
2Reliability
If moisture absorption member is positioned above storage tank wall on side of plate, then vapor condensation around air through hole is prevented, but device complexity increases
Solution Approach 1:
The moisture absorption member serves multiple functions: it absorbs excess vapor, prevents condensation on the plate surface, and acts as a protective barrier. By combining these functions into a single component placed in one location, the solution achieves improved humidity control without proportionally increasing device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents water generated by dew condensation from entering the air flow, enhancing humidity control precision and stability by using a moisture absorption member, such as a sponge, to cover part of the air through hole and reduce pressure loss.
Implementation Method 1
a moisture absorption member that extends in an up and down direction, above a wall part of the storage tank on the side of the plate, or diagonally thereabove on the side of the plate
Implementation Method 2
a heater that heats the water in the storage tank
Implementation Method 3
vapor from the humidifier condenses on a wall surface around the through hole of the aforementioned plate
Data Source
AI summary
An air conditioner including; an air flow path through which air flows; a plate having an air through hole installed in a downstream opening of the air flow path; and a humidifier disposed on the air flow path and capable of supplying vapor into the air flow path. The air flow path has a horizontal channel provided with the downstream opening and extending along a horizontal direction, and the humidifier is disposed on the horizontal channel. The humidifier includes a water storage tank opened upward to an inside of the horizontal channel, and a heater that heats the water in the storage tank. The air conditioner further includes a moisture absorption member that extends in an up and down direction, above a wall part of the storage tank on the side of the plate, or diagonally thereabove on the side of the plate.