High-Voltage DC Generator Stability via Counterphase Damping

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Solution Overview

Problem

Existing high-voltage DC generators for particle beam apparatuses, such as electron microscopes, face limitations in stabilizing high voltage due to oscillations in the amplitude regulator, which restricts the achievable stability and bandwidth, preventing the stabilization of any desired high voltage.

Innovation Solution

The system incorporates a Cockroft-Walton generator, an AC voltage source, a step-up transformer, filters, a capacitive divider, an amplifier, and a controllable voltage source, where fluctuations detected by the capacitive divider are used to control the controllable voltage source in counterphase, effectively damping high-voltage fluctuations and expanding the stabilization bandwidth to include higher-frequency interference.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an amplitude regulator is used to stabilize high voltage in a particle beam apparatus, then voltage stability is improved, but oscillations occur that limit the achievable stability and bandwidth

Engineering Contradiction:
Improvehigh voltage stabilityVSAvoidstabilization bandwidth
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The feedback system is segmented into two independent parts: a conventional amplitude regulator for low-frequency stabilization and a new controllable voltage source for high-frequency stabilization. This segmentation allows each component to operate within its optimal frequency range without causing oscillations, thereby resolving the contradiction between stability and bandwidth.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A controllable voltage source is introduced as an intermediary component between the capacitive divider and the Cockroft-Walton generator. This intermediary actively compensates for high-frequency voltage fluctuations by injecting counter-phase signals, enabling extended bandwidth without compromising the stability provided by the amplitude regulator.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If the amplitude regulator gain is increased to improve stabilization, then voltage stability is improved, but oscillations are triggered that limit further gain increases

Engineering Contradiction:
Improvevoltage stabilityVSAvoidsystem oscillation
Core Design Contradiction:
ReliabilityVSStability of the object's composition

Solution Approach 1:

The feedback system is divided into two independent control loops with different gain characteristics. The amplitude regulator operates with moderate gain for low-frequency stability, while the controllable voltage source provides high-frequency correction with its own gain control. This segmentation allows high overall stabilization without triggering oscillations that would limit a single high-gain amplifier.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Instead of using a single amplifier with excessive gain that causes oscillations, the system applies partial correction through two stages: the amplitude regulator handles the necessary low-frequency correction, and the controllable voltage source provides additional high-frequency correction. This distributed partial action achieves superior stabilization without the harmful effects of excessive single-stage gain.

Inventive Principle:
Principle #16Partial or excessive action

3Reliability

If a conventional feedback system is used, then low-frequency fluctuations are damped, but higher-frequency interference cannot be suppressed

Engineering Contradiction:
Improvelow-frequency stabilizationVSAvoidfrequency range coverage
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The controllable voltage source is designed to be dynamically responsive to high-frequency fluctuations detected by the capacitive divider. By actively adjusting its output in real-time based on the detected high-frequency components, the system extends its frequency range coverage while maintaining the low-frequency stabilization provided by the amplitude regulator.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

A dual feedback mechanism is implemented: the amplitude regulator receives feedback for low-frequency control, and the controllable voltage source receives feedback from the capacitive divider for high-frequency control. This multi-loop feedback system enables the apparatus to suppress fluctuations across a broad frequency spectrum, combining the strengths of both feedback paths.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration allows for the stabilization of any desired high voltage, effectively damping interfering fluctuations and suppressing higher-frequency interference, thereby enhancing the stability and dynamics of the high-voltage supply to particle beam apparatuses.

Implementation Method 1

Fluctuations of the smoothed high voltage are detected via a capacitive divider, which includes a first capacitor and a second capacitor

Methodology Applied
Scientific EffectCapacitive division: Capacitance

Implementation Method 2

The amplifier provides an output signal, which is supplied to the amplitude regulator

Methodology Applied
Scientific EffectSignal amplification: Magnetic Amplifier

Implementation Method 3

The amplifier controls the controllable voltage source in counterphase. The voltage of the controllable voltage source is superimposed on the smoothed high voltage

Methodology Applied
Scientific EffectCounterphase voltage generation: Feedback

Implementation Method 4

The high voltage resulting in this way is smoothed via a filter or multiple filters made of resistors and capacitors

Methodology Applied
Scientific EffectVoltage smoothing: Filter (electronic)

Implementation Method 5

The step-up transformer steps up the AC voltage

Methodology Applied
Scientific EffectVoltage transformation: Electromagnetic Induction

Implementation Method 6

The output voltage of the step-up transformer is in turn supplied to a Cockroft-Walton generator, which multiplies the output voltage of the step-up transformer

Methodology Applied
Scientific EffectVoltage multiplication: Electrostatic Induction

Data Source

PatentUS8390152B2Device and method for generating a stable high voltage
Publication Date: 2013.03.05 CARL ZEISS NTS GMBH
  • US8390152B2 patent drawing
  • US8390152B2 patent drawing
  • US8390152B2 patent drawing

AI summary

A device is disclosed for generating a stable high voltage, namely a high-voltage DC generator for a particle beam apparatus. A method is also disclosed for generating a stable high voltage for a particle beam apparatus. The high-voltage DC generator has a controllable voltage source, which is connected to an amplifier. The high-voltage DC generator ensures that fluctuations of the smoothed high voltage are detected by a capacitive divider and supplied to the amplifier. The amplifier controls the controllable voltage source in counterphase. The voltage of the controllable voltage source is superimposed on the smoothed high voltage. The sum of the voltage of the controllable voltage source and the smoothed high voltage forms the generated and stable high voltage, which is supplied to a particle beam apparatus.