Hybrid BAW Resonator Structure for Higher Coupling at GHz Frequencies

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Solution Overview

Problem

Existing resonant structures face challenges in achieving high frequency operation with sufficient coupling coefficient, leading to limitations in remote measurement applications, particularly with volume wave solutions and composite structures.

Innovation Solution

A resonant structure with a piezoelectric transducer comprising two electrodes surrounding a piezoelectric layer, where one electrode is coated with an additional layer to optimize acousto-electric density, and a Bragg mirror is used to position the stress 'belly' within the piezoelectric layer, enhancing coupling performance and reducing overvoltage effects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If conventional body-wave resonators use thin piezoelectric plates to achieve high frequency operation, then frequency increases, but mechanical strength and reliability deteriorate due to excessive thinning

Engineering Contradiction:
Improveoperating frequencyVSAvoidmechanical strength
Core Design Contradiction:
SpeedVSStrength

Solution Approach 1:

The patent employs a composite structure consisting of a piezoelectric layer deposited on a non-piezoelectric substrate. This composite configuration allows the use of extremely thin piezoelectric layers (a few micrometers) while the substrate provides mechanical support and strength. The substrate acts as a structural backbone that compensates for the weakness of thin piezoelectric films, enabling high-frequency operation without sacrificing mechanical integrity.

Inventive Principle:
Principle #40Composite materials

2Speed

If passive surface acoustic wave components are used to achieve frequency ranges exceeding one gigahertz, then frequency increases, but device size increases due to acoustic wavelength requirements

Engineering Contradiction:
Improveoperating frequencyVSAvoiddevice size
Core Design Contradiction:
SpeedVSVolume of moving object

Solution Approach 1:

The patent utilizes a thin-film piezoelectric layer deposited on a substrate, creating a compact resonator structure. The thin-film configuration allows the device to achieve gigahertz frequencies while maintaining a small footprint, as the active piezoelectric layer thickness is on the order of micrometers rather than the millimeter-scale dimensions required by conventional bulk acoustic wave devices.

Inventive Principle:
Principle #30Flexible shells and thin films

3Speed

If composite resonant structures use piezoelectric films on non-piezoelectric substrates, then frequency operation improves, but coupling coefficient decreases

Engineering Contradiction:
Improvefrequency operationVSAvoidcoupling coefficient
Core Design Contradiction:
SpeedVSReliability

Solution Approach 1:

The patent optimizes the coupling coefficient by carefully controlling the thickness of the piezoelectric layer and the properties of the substrate. By adjusting these parameters, the resonator achieves both high-frequency operation and sufficient electromechanical coupling. The piezoelectric layer thickness is specifically designed to maximize coupling while the substrate properties are selected to enhance the overall coupling coefficient, resolving the trade-off between frequency operation and coupling strength.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly increases the coupling coefficient by a factor of 5 to 10, allowing for improved frequency operation and reduced insertion losses, making it suitable for remote measurement applications.

Implementation Method 1

through the inverse piezoelectric effect, a deformation of the plate 4

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

Applying a radio frequency (RF) field across the terminals of the resulting dipole 2, 3 induces, through the inverse piezoelectric effect, a deformation of the plate 4

Methodology Applied
Scientific EffectInverse piezoelectric effect: Converse Piezoelectric Effect

Implementation Method 3

body waves, often longitudinally polarized, simultaneously exhibiting very high propagation speeds and high piezoelectric coupling

Methodology Applied
Scientific EffectAcoustic wave propagation: Sound

Implementation Method 4

a Bragg mirror is used to position the stress 'belly' within the piezoelectric layer

Methodology Applied
Scientific EffectBragg reflection: Bragg Diffraction

Data Source

PatentEP1748556B1Hybrid resonant structure
Publication Date: 2019.10.02 TDK ELECTRONICS AG
  • EP1748556B1 patent drawingFigure 1~2C
  • EP1748556B1 patent drawingFigure 2D~3
  • EP1748556B1 patent drawingFigure 4~6

AI summary

A structure has a piezoelectric transducer (14) on a substrate (12) and comprising two conductive electrodes (16, 20) separated by a piezoelectric material layer (18), where the thickness (e18) of the layer is given by a specified relation. An additional layer (22) is placed on the surface of the electrode (20) opposite to the layer (18), where the thickness (e22) of the layer (22) is fixed for optimizing the acoustic-electric density inside the layer (18). Independent claims are also included for the following: (1) a frequency filter comprising a set of resonant structures; (2) a radio frequency transducer comprising an antenna associated to a resonant structure or to a frequency filter; and (3) the production of a hybrid bulk acoustic wave resonant structure.