Hybrid Bonding Tooling Cleaning With Integrated Multi-Chamber Transfer
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Solution Overview
Problem
In hybrid bonding processes, tooling parts in the bonding chamber can become dirty, leading to defects in subsequent dies being processed. Current cleaning methods require significant time and additional parts, reducing processing throughput and increasing contamination control challenges.
Innovation Solution
A multi-chamber processing tool is designed to facilitate in-situ cleaning of tooling parts. This tool includes a bonding chamber for dirty tools, a cleaning chamber for cleaning, a drying chamber for drying, and an inspection chamber for quality control. The tooling parts are transferred between these chambers for cleaning, inspection, and reinstallation, minimizing manual handling and downtime.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If tooling parts are taken out for cleaning with tight particle and organic contamination control, then cleaning quality is improved, but processing throughput is reduced and cleaning time increases
Solution Approach 1:
The system segments the cleaning process into multiple specialized chambers (RINSE chamber, CLEAN chamber, DRY chamber) that operate in sequence. Each chamber performs a specific cleaning function, allowing the tooling to be cleaned thoroughly while the process is integrated into the manufacturing flow, minimizing downtime and maintaining throughput.
Solution Approach 2:
The RINSE chamber performs a preliminary cleaning action by rinsing the tooling with liquid to remove loose particles before the tooling enters the main CLEAN chamber. This preliminary action reduces the contamination load on subsequent cleaning stages, improving overall cleaning efficiency while maintaining throughput.
2Reliability
If traditional cleaning methods are used, then contamination control is achieved, but additional parts are required and device complexity increases
Solution Approach 1:
The system merges multiple cleaning functions (rinsing, cleaning, drying) and previously separate components (tooling, cleaning apparatus, transfer mechanisms) into a single integrated multi-chamber system. This consolidation maintains contamination control while reducing the number of separate parts and simplifying the overall device architecture.
Solution Approach 2:
The holder is designed with universal functionality to both hold substrates during processing and transport tooling parts between chambers. This multi-functionality eliminates the need for separate carrying mechanisms, reducing part count while maintaining contamination control through the sealed chamber design.
3Manufacturing precision
If tooling parts are cleaned externally, then cleaning effectiveness is improved, but transfer time and loss of time increase
Solution Approach 1:
The cleaning chambers are merged with the processing tool structure, allowing tooling to be cleaned in-situ without external transfer. The holder directly transports tooling from the bonding chamber through the cleaning and drying chambers, eliminating external handling and transfer time while maintaining cleaning effectiveness.
Solution Approach 2:
The system establishes continuous action by having the holder continuously transport tooling through the cleaning sequence (RINSE → CLEAN → DRY) without interruption or external handling. This continuous flow minimizes transfer time and maintains cleaning effectiveness through uninterrupted processing.
Data Source
AI summary
Methods and apparatus for cleaning tooling parts in a substrate processing tool are provided herein. In some embodiments, a method of cleaning tooling parts in a substrate processing tool includes placing one or more dirty tools on a holder in a bonding chamber of a multi-chamber processing tool; transferring the holder from the bonding chamber to a cleaning chamber of the multi-chamber processing tool; cleaning the one or more dirty tools in the cleaning chamber to produce one or more cleaned tools; inspecting the one or more cleaned tools in an inspection chamber of the multi-chamber processing tool; and transferring the one or more cleaned tools to the bonding chamber.