Hybrid Contact Layout for Stable Micromachined Ultrasonic Transducers

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Solution Overview

Problem

The integration of micromachined ultrasonic transducers (MUTs) with application-specific integrated circuits (ASICs) using only electrical contacts can destabilize the MUTs and reduce their dynamic performance, affecting pressure output, surface velocity, and ultrasonic frequency bandwidth.

Innovation Solution

The implementation of hybrid contacts that enable both electrical and mechanical connections between the MUTs and ASICs, enhancing MUT dynamics by adding mechanical contacts, rearranging existing contacts, and modifying their dimensions and shapes according to specific geometric rules.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If only electrical contacts are used to integrate MUT with ASIC, then electrical signal transmission is achieved, but MUT dynamic performance deteriorates and stability is reduced

Engineering Contradiction:

ImproveMUT stabilityVSAvoidMUT dynamic performance

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The patent combines electrical contacts with mechanical contacts into a hybrid contact structure. The electrical contact provides signal transmission while the mechanical contact provides structural support and stabilizing force, merging two functional elements into a unified integration solution that simultaneously achieves electrical connectivity and mechanical stability.

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The hybrid contact structure functions as a composite system where electrical contacts (conductive material) and mechanical contacts (structural material) work together. Each contact type contributes its specialized properties - electrical conductivity from the electrical contact and mechanical stability from the mechanical contact - creating a composite solution superior to either contact type alone.

Inventive Principle:

Principle #40Composite materials

2Productivity

If electrical contacts are used for MUT integration, then signal communication is enabled, but pressure output and surface velocity are reduced

Engineering Contradiction:

Improvepressure outputVSAvoidcontact configuration

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The hybrid contact structure merges electrical contacts for signaling with mechanical contacts for force transmission. The mechanical contact provides the necessary structural support and stabilizing force that enables higher pressure output and surface velocity, while the electrical contact maintains signal communication functionality.

Inventive Principle:

Principle #5Merging (Combining)

3Adaptability or versatility

If electrical contacts are used for MUT integration, then ASIC connectivity is achieved, but ultrasonic frequency bandwidth is reduced

Engineering Contradiction:

Improvefrequency bandwidthVSAvoidcontact structure

Core Design Contradiction:

Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent merges electrical contacts with mechanical contacts in a hybrid configuration where the mechanical contact provides structural stability that enables broader frequency operation. This combined structure supports wider ultrasonic frequency bandwidth compared to electrical contacts alone, while maintaining ASIC connectivity through the electrical contact component.

Inventive Principle:

Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The use of hybrid contacts significantly enhances the dynamic performance of MUTs, improving the magnitude of pressure output, surface velocity, and ultrasonic frequency bandwidth, thereby stabilizing the transducers and optimizing their operational performance.

Implementation Method 1

an ultrasonic transducer element comprising a substrate and a membrane

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

the electrical contact(s) can play a secondary but significant role in dictating the MUT dynamics because they act as a mechanical spring

Methodology Applied

Scientific EffectElasticity: Elasticity

Data Source

PatentUS12274174B2Systems and methods for integrating ultrasonic transducers with hybrid contacts

Publication Date: 2025.04.08 EXO IMAGING INC

AI summary

Disclosed herein are ultrasonic transducer systems with hybrid contacts comprising: an ultrasonic transducer element comprising a substrate and a membrane; an electrical circuitry; and one or more contacts connected to the ultrasonic transducer element and the electrical circuitry, wherein the one or more contacts are: designed geometrically using a set of rules; arranged with respect to the membrane based on the set of rules or a second set of rules, or both.