Hybrid Contacts for Stable Micromachined Ultrasonic Transducer Dynamics
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Solution Overview
Problem
Conventional micromachined ultrasonic transducer (MUT) systems integrated with application-specific integrated circuits (ASICs) using electrical contacts alone destabilize the MUT, reducing its dynamic performance due to inadequate consideration of mechanical boundary conditions.
Innovation Solution
Implementing hybrid contacts that combine electrical and mechanical connections, designed and arranged according to specific geometric rules, to enhance the dynamic performance of MUTs by improving mechanical support and stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If electrical contacts alone are used to integrate MUT with ASIC, then electrical signal transmission is achieved, but mechanical stability and dynamic performance of MUT deteriorate
Solution Approach 1:
The patent merges electrical and mechanical contact functions into a single hybrid contact structure. The contact simultaneously provides electrical signal transmission and mechanical boundary condition support, eliminating the need for separate electrical and mechanical contact systems while improving MUT stability and dynamic performance
Solution Approach 2:
The contact structure is designed to perform multiple functions: electrical signal transmission, mechanical support, and boundary condition definition. This multi-functional contact replaces conventional single-function electrical contacts, resolving the contradiction between simplicity and performance by making the contact system universally applicable to both electrical and mechanical requirements
2Manufacturing precision
If conventional electrical contacts are used, then electrical connection is established, but mechanical boundary conditions are inadequate, reducing MUT dynamic performance
Solution Approach 1:
The patent changes the physical parameters of the contact structure, including its geometry, material properties, and mechanical stiffness, to provide adequate mechanical boundary conditions. By adjusting these parameters, the contact can simultaneously maintain electrical connectivity and provide the necessary mechanical support for high-precision MUT operation
3Reliability
If additional mechanical contacts are added to enhance MUT dynamics, then dynamic performance improves, but device complexity increases
Solution Approach 1:
The patent combines electrical and mechanical contact functions into a single hybrid contact structure. This merging approach provides the necessary mechanical support for enhanced MUT dynamics without requiring additional separate mechanical contacts, thereby avoiding increased device complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The hybrid contact approach significantly enhances the dynamic performance of MUTs by increasing surface velocity, pressure output, and ultrasonic frequency bandwidth, offering a more stable and reliable operation.
Implementation Method 1
an ultrasonic transducer element comprising a substrate and a membrane; the ultrasonic transducer element is a piezoelectric micromachined ultrasonic transducer (pMUT) element
Implementation Method 2
the electrical contact(s) can play a secondary but significant role in dictating the MUT dynamics because they act as a mechanical spring that impacts critical boundary conditions
Data Source
AI summary
Disclosed herein are ultrasonic transducer systems with hybrid contacts comprising: an ultrasonic transducer element comprising a substrate and a membrane; an electrical circuitry; and one or more contacts connected to the ultrasonic transducer element and the electrical circuitry, wherein the one or more contacts are: designed geometrically using a set of rules; arranged with respect to the membrane based on the set of rules or a second set of rules, or both.