Hybrid Diffraction Grating Master Template Replication
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Solution Overview
Problem
Conventional methods for manufacturing diffraction gratings with varying blaze angles are time-consuming, expensive, and prone to positioning errors, leading to inefficiencies and stray light due to the need for multiple diamond cutting tools and precise alignment.
Innovation Solution
A hybrid diffraction grating manufacturing method using a profile to define multiple blaze angles, allowing for the creation of diffraction structures with adjustable blaze angles through replication processes, eliminating the need for multiple cutting tools and enabling flexible design of diffraction efficiency curves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple diamond cutting tools are used to create diffraction structures with different blaze angles, then the diffraction grating can achieve varied blaze angles, but the manufacturing time and cost increase significantly
Solution Approach 1:
The patent uses a master grating as a template to replicate diffraction structures with different blaze angles. The master grating contains various blaze angle structures that are copied onto multiple substrates simultaneously through a replication process, eliminating the need for multiple cutting tools and reducing manufacturing time while maintaining blaze angle versatility
Solution Approach 2:
The patent combines multiple diffraction structure patterns into a single master grating template. By integrating various blaze angle designs into one master structure, the system can produce multiple types of diffraction gratings in parallel, thereby improving productivity while maintaining the ability to create varied blaze angles
2Adaptability or versatility
If multiple diamond cutting tools are used to create diffraction structures with different blaze angles, then the diffraction grating can achieve varied blaze angles, but the manufacturing cost increases
Solution Approach 1:
The replication process uses a single master grating template to create multiple diffraction gratings with different blaze angles. This copying approach eliminates the need to purchase and maintain multiple expensive diamond cutting tools, significantly reducing manufacturing costs while maintaining the capability to produce varied blaze angle structures
Solution Approach 2:
The master grating serves as a universal template that can replicate multiple types of diffraction structures with different blaze angles. This multi-functional master template replaces the need for multiple specialized cutting tools, reducing equipment investment and manufacturing costs while maintaining versatility in blaze angle production
3Adaptability or versatility
If cutting tools are changed to create different blaze angles, then the diffraction grating can achieve varied blaze angles, but positioning errors are introduced
Solution Approach 1:
The replication process transfers patterns from a master grating to substrates using precise alignment mechanisms. This copying method eliminates the positioning errors associated with changing cutting tools, as the master grating's pre-defined patterns ensure consistent and accurate blaze angle formation without requiring tool repositioning
Solution Approach 2:
The master grating is prepared in advance with all the required blaze angle patterns precisely defined. By pre-establishing the patterns in the master template, the system eliminates the need for real-time positioning adjustments during production, thereby preventing positioning errors and ensuring manufacturing precision
4Ease of manufacture
If a single diamond cutting tool is used with fixed blade, then the manufacturing process is simpler, but only a single blaze angle can be produced
Solution Approach 1:
The patent uses a master grating containing multiple blaze angle patterns as a template. A single cutting tool or replication process copies these pre-defined patterns onto substrates, maintaining process simplicity while enabling the production of multiple blaze angle variations through the master template's diverse patterns
Solution Approach 2:
The patent transitions from varying blaze angles through tool changes (one-dimensional approach) to varying blaze angles through pattern selection from a master template (adding the dimension of pattern library). This allows a single tool to produce multiple blaze angles by referencing different patterns in the master grating, maintaining simplicity while enabling versatility
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the production of diffraction gratings with customizable diffraction efficiency curves, reducing manufacturing time and costs while minimizing alignment errors, enabling the creation of multiple gratings on a single wafer with improved optical performance.
Implementation Method 1
forming a first patterned layer on a main body by performing a replication process on a surface of the main body along a first direction perpendicular to the surface of a main body based on a profile
Implementation Method 2
a diffraction grating in combination with a collimation and a correcting lens to focus spectral components on an image plane
Implementation Method 3
forming a reflective layer on the main body by executing a reflective layer forming process via the first patterned layer
Data Source
AI summary
A hybrid diffraction grating, a mold used to produce the hybrid diffraction grating, and their manufacturing methods are described. In one aspect, a hybrid diffraction grating comprises a grating main body and a reflective layer. The grating main body comprises numerous diffraction structures. When viewed along a top-view direction, the numerous diffraction structures are arranged in a pattern defined by a profile. The profile determines various blaze angles of the numerous diffraction structures. The reflective layer, disposed on the diffraction structures, exhibits characteristics of the numerous diffraction structures.


