Hybrid EUV Imaging Spectrometer for Sub-Nanometer Chemical Mapping
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Solution Overview
Problem
Current extreme ultraviolet (EUV) imaging technologies face limitations in achieving sub-nanometer spatial resolution for elemental constituents and producing accurate three-dimensional chemical maps, particularly due to thermal desorption and the formation of multiply charged ions when using conventional UV radiation.
Innovation Solution
A hybrid EUV imaging spectrometer that employs EUV radiation to photoionize atoms, producing singly charged photoions through radiative desorption in the presence of an external electric field, combined with primary electrons to form scattered electrons, allowing for precise detection and imaging with sub-nanometer resolution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional UV radiation is used for imaging, then thermal desorption and multiply charged ion formation occur, but sub-nanometer spatial resolution and accurate three-dimensional chemical maps cannot be achieved
Solution Approach 1:
The patent changes the radiation parameter from conventional UV to extreme ultraviolet (EUV) radiation, which has higher energy and shorter wavelength. This parameter change enables photoionization of atoms to produce singly charged photoions through radiative desorption, eliminating thermal desorption effects and achieving sub-nanometer spatial resolution for accurate three-dimensional chemical mapping
2Measurement precision
If EUV radiation is used to photoionize atoms, then singly charged photoions are produced through radiative desorption, but the device complexity increases due to the need for external electric field and hybrid detection system
Solution Approach 1:
The patent merges ion detection and electron detection capabilities into a single hybrid imaging spectrometer system. The ion detector detects photoions as a function of time-of-arrival or position, while the electron detector detects scattered electrons, and both datasets are integrated by an analyzer to produce unified three-dimensional chemical maps, reducing operational complexity despite the advanced detection capabilities
3Adaptability or versatility
If primary electrons are used to form scattered electrons, then additional detection capability is gained, but the quantity of radiation and particle sources increases
Solution Approach 1:
The hybrid imaging spectrometer is designed with multi-functionality, where the same system can detect both photoions (for elemental composition) and scattered electrons (for structural information) using a unified detection and analysis platform. This universal design allows the system to perform multiple analytical functions without requiring separate independent instruments, improving versatility while managing complexity through integration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The hybrid EUV imaging spectrometer achieves quantitative three-dimensional chemical maps with sub-nanometer spatial resolution, reducing element-to-element variation in evaporation rates and minimizing complex ion formation, providing more uniform and accurate elemental analysis across a wide range of materials.
Implementation Method 1
produce EUV radiation; subject a sample to the EUV radiation; photoionize a plurality of atoms of the sample; and form photoions from the atoms subject to photoionization by the EUV radiation
Implementation Method 2
the photoions being radiatively desorbed from the sample in response to the sample being subjected to the EUV radiation in a presence of an external electric field
Implementation Method 3
produce a plurality of primary electrons; subject the sample to the primary electrons; and form scattered electrons from the sample in response to the sample being subjected to the primary electrons
Data Source
AI summary
A hybrid extreme ultraviolet (EUV) imaging spectrometer includes: a radiation source to: produce EUV radiation; subject a sample to the EUV radiation; photoionize a plurality of atoms of the sample; and form photoions from the atoms subject to photoionization by the EUV radiation, the photoions being desorbed from the sample in response to the sample being subjected to the EUV radiation; an ion detector to detect the photoions: as a function of a time-of-arrival of the photoions at the ion detector after the sample is subjected to the EUV radiation; or as a function of a position of the photoions at the ion detector; an electron source to: produce a plurality of primary electrons; subject the sample to the primary electrons; and form scattered electrons from the sample in response to the sample being subjected to the primary electrons; and an electron detector to detect the scattered electrons: as a function of a time-of-arrival of the scattered electrons at the electron detector after the sample is subjected to the EUV radiation or the primary electrons; or as a function of a position of the scattered electrons at the electron detector.