Hybrid FinFET SRAM Cell Layout for Density and Stability

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Solution Overview

Problem

As semiconductor integrated circuits (ICs) become smaller and more complex, issues such as cross-talk and wiring resistance affect their performance, particularly in static random access memory (SRAM) devices, where existing technologies struggle to maintain high-density integration and stability without compromising read and write margins.

Innovation Solution

The implementation of a hybrid memory cell architecture that combines single-fin and multiple-fin FinFET transistors within a single SRAM memory chip, eliminating the need for read assist circuitry in all memory cells, and utilizing a co-optimized layout of hybrid single-fin and multiple-fin cells to achieve high-density integration and improved performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If memory cell density is increased to improve integration, then productivity is improved, but cross-talk and wiring resistance increase causing performance degradation

Engineering Contradiction:
Improvememory cell densityVSAvoidperformance stability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent divides the memory chip into two distinct memory regions: a first memory region with first memory cells and a second memory region with second memory cells. This segmentation allows different cell designs to be used in different regions, optimizing for both high density and high performance without requiring read assist circuitry in all cells.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent applies different memory cell structures to different regions of the memory chip. The first memory cells in the first region are designed for high density without read assist circuitry, while the second memory cells in the second region are designed for high performance with improved read margins. This local differentiation allows each region to have optimized characteristics for its specific function.

Inventive Principle:
Principle #3Local quality

2Reliability

If read assist circuitry is added to all memory cells to improve read performance, then reliability is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improveread performanceVSAvoidcircuit complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent implements read assist circuitry only in the second memory region where high read performance is critical, while the first memory region operates without read assist circuitry. This selective application reduces overall device complexity and manufacturing cost while maintaining high read performance where needed.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent segments the memory array into regions with and without read assist circuitry, allowing the system to achieve high overall performance without requiring every single memory cell to have complex assist circuitry. The second memory region with read assist circuitry compensates for performance requirements while the first region provides high-density storage.

Inventive Principle:
Principle #1Segmentation

3Productivity

If memory cells are made smaller to increase density, then productivity is improved, but alpha ratios deteriorate and manufacturing precision becomes more difficult to maintain

Engineering Contradiction:
Improveintegration densityVSAvoidalpha ratio control
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

The patent divides the memory into two regions with different cell size optimizations. The first memory cells are optimized for minimal size to achieve high density, while the second memory cells are optimized for manufacturability and performance with larger dimensions that maintain better alpha ratios and are easier to manufacture with precision.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent uses different aspect ratios for the first and second memory cells. The first memory cells have aspect ratios optimized for high density packing, while the second memory cells have aspect ratios optimized for manufacturing precision and alpha ratio control. This parameter differentiation allows each region to achieve its specific optimization goals.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS10381070B2Integrated circuit
Publication Date: 2019.08.13 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US10381070B2 patent drawing
  • US10381070B2 patent drawing
  • US10381070B2 patent drawing

AI summary

An integrated circuit includes a plurality of first memory cells and a plurality of second memory cells. Each cell of the plurality of first memory cells includes a first inverter, a second inverter, a first pass-gate (PG) transistor and a second PG transistor. Each inverter of the first and second inverters includes a P-type single FinFET transistor and an N-type single FinFET transistor. The first PG transistor and the second PG transistor each are an N-type single FinFET transistor. Each cell of the plurality of second memory cells includes a third inverter, a fourth inverter, a third PG transistor and a fourth PG transistor. Each inverter of the third and fourth inverters includes a P-type single FinFET transistor and an N-type transistor. Each transistor of the third and fourth PG transistors include at least two FinFET transistors electrically coupled in a parallel configuration.