Hybrid Flow Ratio Control for Stable Multi-Channel Fluid Distribution
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Solution Overview
Problem
Conventional flow ratio controllers face challenges in providing repeatable and reproducible fluid flows, especially at low flow rates, due to variations in inlet flow rate and pressure, which can lead to errors in flow ratio control and affect precision in applications like semiconductor manufacturing.
Innovation Solution
A hybrid flow ratio controller system is introduced, featuring multiple distribution channels with variable flow control valves and a controller that operates in various control modes (flow ratio, flow rate, pressure, and overflow) to stabilize and adjust fluid flows in real-time, accommodating errors in the total inlet flow.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional flow ratio controller is used to divide inlet flow into multiple channels, then flow distribution is achieved, but flow repeatability and precision deteriorate due to upstream flow rate and pressure variations
Solution Approach 1:
The patent implements feedback control by measuring the actual inlet flow rate and pressure, then using these measurements to dynamically adjust the flow distribution ratios to multiple channels. This closed-loop feedback mechanism compensates for upstream variations, ensuring repeatable and precise flow control despite changes in total inlet flow conditions.
Solution Approach 2:
The system transitions from static flow ratio settings to dynamic adjustment of flow distribution. The control system continuously adapts the flow ratios to multiple channels based on real-time inlet conditions, enabling the system to maintain precision under varying operational conditions rather than relying on fixed predetermined ratios.
2Adaptability or versatility
If flow ratio control is implemented without limiting channel number, then system versatility is improved, but system complexity increases
Solution Approach 1:
The patent creates a universal flow distribution system that can accommodate any number of channels and various control configurations (flow rate control, pressure control, or combined control for each channel) through a single integrated controller. This multi-functional design allows the same basic architecture to serve diverse application requirements without requiring separate specialized systems for different channel configurations.
Data Source
AI summary
A hybrid flow ratio controller system is provided, which includes an inlet configured to receive a total inlet fluid flow and three or more distribution channels. Each of the three or more distribution channels has a respective variable flow control valve and carries a respective portion of the total inlet fluid flow. The hybrid flow ratio controller further includes a controller operatively coupled to the respective variable flow control valves. The controller is configured to control a flow rate of at least a first distribution channel according to a predetermined flow ratio of the inlet fluid flow in accordance with a flow ratio control mode, to control a flow of at least a second distribution channel in either a flow rate control mode or a pressure control mode, and to control a third distribution channel in an overflow mode.