Hybrid Geophone MEMS Sensor System for Low-Frequency Detection

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Solution Overview

Problem

Current sensor technologies, such as geophones and MEMS sensors, face challenges in achieving high sensitivity and reliability in low-frequency regions, leading to variations in data quality and accuracy during resource exploration, particularly with the introduction of new MEMS sensors, which complicates analysis methods like full waveform inversion.

Innovation Solution

A system utilizing both geophone and MEMS sensor terminals with different operating principles, deployed at varying densities, to enhance data accuracy and reliability by accounting for sensor sensitivity variations and improving low-frequency data quality.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If MEMS sensors are introduced to improve sensitivity in low-frequency region, then measurement precision is improved, but device complexity increases and reliability decreases due to shorter history and more complex structure

Engineering Contradiction:
Improvesensitivity in low-frequency regionVSAvoidlong-term reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent combines MEMS sensors and geophones into a hybrid sensor system. The MEMS sensors provide high sensitivity in the low-frequency region, while the geophones provide proven reliability and stability. By merging these two sensor types, the system achieves both improved measurement precision and maintained reliability, resolving the contradiction between the advantages and disadvantages of using MEMS sensors alone.

Inventive Principle:
Principle #5Merging (Combining)

2Measurement precision

If MEMS sensors are used to improve frequency characteristics, then measurement precision is improved, but device complexity increases

Engineering Contradiction:
Improvefrequency characteristicsVSAvoidsensor structure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The hybrid sensor system serves multiple functions: MEMS sensors handle low-frequency detection with high precision, geophones provide stable measurements across frequency ranges, and the processing apparatus performs sensor calibration and data fusion. This multi-functionality allows the system to achieve improved frequency characteristics without relying solely on complex MEMS structures, thereby reducing overall device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Measurement precision

If sensor deployment density is increased to improve data accuracy, then measurement precision is improved, but loss of time and cost increase

Engineering Contradiction:
Improvedata accuracyVSAvoidoperational time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies different sensor deployment densities based on local requirements. High-density deployment of MEMS sensors is used in areas requiring high measurement precision for low-frequency signals, while lower-density deployment of geophones is used in areas where stability is more critical. The processing apparatus dynamically adjusts the weighting of sensor data based on local geological conditions and measurement requirements, optimizing both data accuracy and operational efficiency.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables the acquisition of highly reliable and accurate data for underground structure detection, improving the precision of resource exploration and reducing operational costs by optimizing sensor deployment and data processing.

Implementation Method 1

Geophones, which are speed sensors utilizing a coil and a magnet

Methodology Applied
Scientific EffectElectromagnetic induction: Electromagnetic Induction

Implementation Method 2

a high sensitive sensor using a micro electromechanical system (MEMS) technology

Methodology Applied
Scientific EffectMicro electromechanical system: Microelectromechanical Systems

Data Source

PatentUS11255990B2Internal structure detection system
Publication Date: 2022.02.22 HITACHI LTD
  • US11255990B2 patent drawing
  • US11255990B2 patent drawing
  • US11255990B2 patent drawing

AI summary

An internal structure detection system includes: two kinds of sensors with different operating principles for receiving reflected waves of vibration applied to an inspection target in an investigation area; and a processing apparatus that detects an internal structure of the inspection target by using the sensor data received by the two kinds of sensors. The two kinds of sensors are deployed in the investigation area with different densities, in a distributed manner.