Hybrid Saturable Inductor Core for Pulse Reflection Damping
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Solution Overview
Problem
Lithographic apparatuses face challenges in generating reproducible and reliable electrical pulses due to reflections from the laser chamber, which interfere with the ability to deliver subsequent pulses, as conventional magnetic switching elements are not effective in damping these reflections without impairing switching operations.
Innovation Solution
A hybrid saturable magnetic core is used in the pulse power circuit, comprising a switch magnetic material for switching and a damping magnetic material to control reflections, where the damping material's hysteresis at the bias point is greater than the switch material's, ensuring effective damping without interfering with the switching function, and the materials' permeability and squareness ratios are optimized to maintain switching efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional magnetic switching elements are used, then switching function is achieved, but reflections from the laser chamber cannot be effectively damped
Solution Approach 1:
The patent applies composite materials by combining two distinct magnetic materials with different properties: a switch material (e.g., nickel-iron alloy) with high permeability for effective switching, and a damping material (e.g., soft magnetic composite) with appropriate hysteresis characteristics for damping reflections. This composite core structure allows simultaneous achievement of reliable switching and reflection damping that neither material could achieve alone.
2Object-generated harmful factors
If damping material is added to damp reflections, then reflection damping is improved, but switching function may be impaired
Solution Approach 1:
The patent applies local quality by assigning different functional properties to different regions or components of the magnetic core. The switch material region provides high permeability for efficient switching operation, while the damping material region provides appropriate hysteresis for reflection damping. Each material is optimized for its specific function, and their combination in the hybrid core achieves both objectives without compromising either switching performance or reflection damping.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The hybrid core effectively dampens pulse energy reflections, preventing ringing and ensuring consistent pulse generation, thereby enhancing the reliability and reproducibility of electrical pulses in lithographic applications.
Implementation Method 1
a hybrid saturable magnetic core predominantly comprising a switch magnetic material arranged and selected to function as a magnetic switch
Implementation Method 2
a magnitude of a hysteresis magnetic permeability of the damping magnetic material at the bias point being greater than a magnitude of a hysteresis of the switch magnetic material at the bias point
Implementation Method 3
a damping magnetic material arranged and selected to damp reflections from the laser chamber
Implementation Method 4
the damping material's hysteresis at the bias point is greater than the switch material's, ensuring effective damping
Data Source
AI summary
A pulsed power circuit (30, 31, 32) including an inductor (55) having a hybrid core of a switch magnetic material arranged and selected to function as a magnetic switch a damping magnetic material arranged and selected to damp energy reflections without interfering with the switch magnetic material functioning as a magnetic switch so that the circuit can mitigate resonances caused by reflected energy without any significant degradation of its switching function as part of an saturable reactor inductor.