Hybrid Laser Array With MEMS Control For Coherence

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Solution Overview

Problem

Conventional fiber laser arrays face limitations in improving energy efficiency and controlling optical beam properties, and semiconductor laser arrays lack sufficient coherence for certain applications.

Innovation Solution

A laser array composed of individually controllable semiconductor lasers, incorporating a hybrid assembly with a semiconductor light-emitting layer, MEMS components, and a silicon IC for precise control of temperature, wavelength, and phase, enabling high coherence and energy efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If fiber lasers are used to achieve high power output and precise control of optical beam properties, then optical energy output and beam control are improved, but energy efficiency deteriorates due to operation at the edge of nonlinear effects and damage thresholds requiring pump laser stages

Engineering Contradiction:
Improveoptical energy outputVSAvoidenergy efficiency
Core Design Contradiction:
PowerVSUse of energy by moving object

Solution Approach 1:

The invention divides the laser system into an array of multiple individual laser elements rather than using a single fiber laser. Each element can be independently controlled and optimized, allowing the system to achieve high total power output while maintaining better energy efficiency by avoiding the need for pump laser stages that are required in conventional fiber laser systems operating at the edge of damage thresholds

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention employs a hybrid assembly combining semiconductor laser elements with microelectromechanical systems (MEMS) components and silicon integrated circuits. This composite structure integrates the advantages of semiconductor lasers (high efficiency) with precise control capabilities, resolving the contradiction between achieving high power output and maintaining energy efficiency

Inventive Principle:
Principle #40Composite materials

2Use of energy by moving object

If semiconductor lasers are used to improve energy efficiency over fiber lasers, then energy efficiency and performance are improved, but coherence and control of optical beam properties deteriorate

Engineering Contradiction:
Improveenergy efficiencyVSAvoidcoherence
Core Design Contradiction:
Use of energy by moving objectVSReliability

Solution Approach 1:

The invention merges multiple semiconductor laser elements into a coherent array system with integrated control. By combining individual semiconductor lasers with controlled phase and amplitude modulation through MEMS components and silicon ICs, the system achieves both high energy efficiency inherent to semiconductor lasers and the coherence required for reliable optical beam control

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The invention implements feedback control mechanisms through silicon integrated circuits that monitor and adjust the operation of individual semiconductor laser elements. This feedback system maintains coherence across the array by actively controlling phase and amplitude relationships, resolving the contradiction between energy efficiency and coherence

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution achieves high optical energy output with low electrical energy consumption, providing precise control over optical beam properties and coherence, suitable for applications like space propulsion and materials processing.

Implementation Method 1

a waveguide layer that is optically coupled to the active medium, wherein the waveguide layer is configured to couple light received at the waveguide layer into the active medium. Wavelength and phase of light emitted by the active medium is at least partially defined by wavelength and phase of light coupled into the active medium by way of the waveguide layer

Methodology Applied
Scientific EffectOptical coupling: Waveguide (optics)

Implementation Method 2

The MEMS reflector/actuator layer includes a light directing element, wherein position of the light directing element (e.g., longitudinal position in the laser and tip and tilt of the light directing element) can be precisely controlled... The light directing element is configured to do any of the following: reflect light emitted by the active medium back through the cavity towards the active medium

Methodology Applied
Scientific EffectLight reflection: Reflection

Implementation Method 3

The conductive rods act to electrically couple componentry in the MEMS reflector/actuator layer with the silicon IC, such that the microcontroller of the silicon IC can control position of the light directing element relative to the active medium (e.g., through electrostatic actuation)

Methodology Applied
Scientific EffectElectrostatic actuation: Electrostatics

Implementation Method 4

a thermal management/electrical routing layer that is configured to control temperature of the laser (e.g., by flowing fluid through fluid channels in the thermal management/electrical routing layer)

Methodology Applied
Scientific EffectFluid cooling: Convection

Implementation Method 5

The spacer layer includes an external cavity between the MEMS reflector/actuator layer and the active medium... The conductive rods act to electrically couple componentry in the MEMS reflector/actuator layer with the silicon IC

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS11621542B2Microsystems and semiconductor hybrid coherent light sources
Publication Date: 2023.04.04 OKANDAN MURAT
  • US11621542B2 patent drawing
  • US11621542B2 patent drawing
  • US11621542B2 patent drawing

AI summary

A laser array (100) is described herein, wherein the laser array comprises semiconductor lasers (102, 104) that are precisely controlled such that an optical beam output by the laser array has desired shape and direction.