Hybrid Plasmonic Waveguide Structure for Compact Pockels Modulation

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Solution Overview

Problem

Photonic components using thin film lithium niobate suffer from a large footprint and limited power handling capability.

Innovation Solution

A hybrid plasmonic photonic structure is developed, comprising a waveguide core, a metal layer, and a layer exhibiting an electric-field-induced Pockels effect, which includes a material like lithium niobate, separated by dielectric layers to form a hybrid plasmonic waveguide, enhancing modulation efficiency and reducing footprint.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If thin film lithium niobate is used in photonic components, then electro-optical performance is improved, but footprint size increases and power handling capability is limited

Engineering Contradiction:
Improveelectro-optical performanceVSAvoidfootprint size
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent employs a composite structure combining metal layers (gold, silver, or aluminum) with dielectric layers (silicon dioxide, silicon nitride, or titanium dioxide) to form a hybrid plasmonic waveguide. This composite approach enables sub-wavelength light confinement while maintaining electro-optical modulation capability, thereby reducing the footprint of photonic components without sacrificing performance

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The invention applies the Pockels effect material (lithium niobate or lithium tantalate) locally in specific regions where electro-optical modulation is required, rather than using it throughout the entire waveguide structure. This localized application reduces the overall footprint while maintaining the necessary electro-optical performance in critical areas

Inventive Principle:
Principle #3Local quality

2Reliability

If thin film lithium niobate is used in photonic components, then electro-optical performance is improved, but power handling capability is limited

Engineering Contradiction:
Improveelectro-optical performanceVSAvoidpower handling capability
Core Design Contradiction:
ReliabilityVSPower

Solution Approach 1:

The hybrid plasmonic structure combines metal-dielectric composites with Pockels effect materials to create a waveguide that can handle higher optical powers. The metal-dielectric composite provides enhanced light confinement and reduced modal overlap with the nonlinear material, enabling better power handling while maintaining electro-optical modulation efficiency

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent modifies the structural parameters of the waveguide, including layer thicknesses (metal layer: 50-200 nm, dielectric layer: 100-500 nm, Pockels effect material layer: 200-1000 nm) and geometric dimensions, to optimize the balance between light confinement, electro-optical interaction strength, and power handling capability. These parameter adjustments enable the structure to withstand higher optical powers without compromising performance

Inventive Principle:
Principle #35Parameter changes

3Area of stationary object

If hybrid plasmonic structure is implemented, then footprint is reduced and light confinement is strengthened, but manufacturing complexity increases

Engineering Contradiction:
Improvefootprint sizeVSAvoidmanufacturing complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The patent divides the waveguide structure into distinct segmented layers (metal layer, dielectric layer, Pockels effect material layer) that can be fabricated separately using standard semiconductor processing techniques. This segmentation allows each layer to be optimized and fabricated independently, then assembled into the final hybrid structure, reducing overall manufacturing complexity despite the multi-layer design

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The structure achieves improved modulation efficiency with strengthened light confinement, minimized insertion loss, and lowered propagation loss, while maintaining a compact design.

Implementation Method 1

A hybrid plasmonic photonic structure includes a waveguide core, a metal layer, and a layer exhibiting an electric-field-induced Pockels effect

Methodology Applied
Scientific EffectPlasmonic effect:

Implementation Method 2

a second layer that has an overlapping relationship with the first waveguide core and the first layer. The first layer comprises a metal, and the second layer comprising a material that exhibits an electric-field-induced Pockels effect

Methodology Applied
Scientific EffectPockels effect: Pockels Effect

Data Source

PatentUS12416821B2Plasmonic photonic structures including a layer that exhibits an electric-field-induced Pockels effect
Publication Date: 2025.09.16 GLOBALFOUNDRIES US INC
  • US12416821B2 patent drawing
  • US12416821B2 patent drawing
  • US12416821B2 patent drawing

AI summary

Plasmonic photonic structures that include a layer that exhibits an electric-field-induced Pockels effect and methods of forming such structures. The structure comprises a waveguide core on a substrate, a first layer that has an overlapping relationship with the first waveguide core, and a second layer that has an overlapping relationship with the first waveguide core and the first layer. The first layer comprises a metal, and the second layer comprising a material that exhibits an electric-field-induced Pockels effect.