Hybrid Potentiometer Encoder Detector for Stage Tilt

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Solution Overview

Problem

Current detector systems for electron microscopes lack the capability to accurately and reliably detect the position and tilt angle of a sample stage with high resolution, which is crucial for precise sample positioning and three-dimensional image reconstruction.

Innovation Solution

A detector apparatus combining a potentiometer for absolute tilt angle detection with high reliability and an encoder for high-resolution tilt angle measurement, where the computing unit calculates the tilt angle based on both signals to ensure accurate and reliable detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If only a potentiometer is used for detection, then the system is simple and reliable for absolute position detection, but the measurement resolution is insufficient

Engineering Contradiction:
Improvedetection resolutionVSAvoiddetection system complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent combines a potentiometer and an encoder into a hybrid detection system. The potentiometer provides absolute position detection with high reliability, while the encoder provides high-resolution relative position detection. The computing unit integrates signals from both sensors to achieve both high resolution and high reliability in a single detection system.

Inventive Principle:
Principle #5Merging (Combining)

2Reliability

If only an encoder is used for detection, then the measurement resolution is high, but the system cannot reliably detect absolute position after power loss

Engineering Contradiction:
Improveabsolute position detection reliabilityVSAvoiddetection resolution
Core Design Contradiction:
ReliabilityVSMeasurement precision

Solution Approach 1:

The potentiometer acts as an intermediary that provides absolute position information to correct the encoder's relative position measurements. When the encoder's cumulative position drifts or loses accuracy (especially after power loss), the potentiometer's absolute position signal serves as a reference to reset and correct the encoder's measurements, ensuring both high resolution and reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Measurement precision

If a single detection method is used, then the system is simple to implement, but it cannot simultaneously achieve high resolution and high reliability

Engineering Contradiction:
Improvedetection resolutionVSAvoiddetection reliability
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent changes the detection parameters by using two different sensing principles with complementary characteristics. The potentiometer uses resistive division for absolute position with high reliability but lower resolution, while the encoder uses optical or magnetic pulses for high-resolution relative position but lower reliability for absolute position. By changing from a single detection parameter to a multi-parameter system, both high resolution and high reliability are achieved simultaneously.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS10014159B2Detector apparatus and charged particle beam system
Publication Date: 2018.07.03 JEOL LTD
  • US10014159B2 patent drawing
  • US10014159B2 patent drawing
  • US10014159B2 patent drawing

AI summary

There is provided a detector apparatus capable of detecting the position or tilt angle of a sample stage with high resolution and high reliability. The detector apparatus (100) is operative to detect the position or tilt angle of the sample stage (2), and has a potentiometer (10) for detecting the position or tilt angle of the sample stage (2), an encoder (20) for detecting the position or tilt angle of the sample stage (2), and a computing unit (30) for calculating the position or tilt angle of the sample stage (2), based both on an output signal from the potentiometer (10) and on an output signal from the encoder (20).