Hybrid Acoustic Resonator Layout for Multi-Band Filter Miniaturization

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Solution Overview

Problem

The increasing number of filters in smartphones due to advanced mobile communication technologies necessitates miniaturization and modularization of filters while maintaining high performance, as conventional methods struggle to integrate different resonator types on a single substrate effectively.

Innovation Solution

A hybrid acoustic resonator is developed, integrating surface and bulk acoustic resonators on a single substrate by using a piezoelectric film with interdigital electrodes and trenches, where bulk-acoustic-wave propagation occurs between trenches with air gaps, allowing both types of resonators to operate along a transversal direction.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple filters are added to support more frequency bands, then communication performance is improved, but the layout area increases

Engineering Contradiction:
Improvefrequency band supportVSAvoidlayout area
Core Design Contradiction:
Adaptability or versatilityVSArea of stationary object

Solution Approach 1:

The patent combines surface acoustic wave resonators and bulk acoustic wave resonators into a single hybrid resonator structure on one substrate. This merging of different resonator types enables multiple frequency bands to be supported while occupying less space than separate filters would require.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The hybrid resonator structure serves multiple functions by integrating both surface acoustic wave and bulk acoustic wave resonating capabilities in one device. This multi-functionality allows a single component to replace multiple separate filters, reducing the overall layout area while maintaining support for various frequency bands.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Volume of moving object

If filter size is reduced for miniaturization, then space efficiency is improved, but integration of different resonator types becomes more difficult

Engineering Contradiction:
Improvefilter sizeVSAvoidintegration complexity
Core Design Contradiction:
Volume of moving objectVSDevice complexity

Solution Approach 1:

The patent divides the piezoelectric film into different functional regions: a first region for surface acoustic wave resonators and a second region for bulk acoustic wave resonators. This segmentation allows each resonator type to be optimized independently while maintaining a compact overall structure, reducing filter size without excessive integration complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent utilizes the thickness dimension of the piezoelectric film to accommodate different resonator structures. By arranging surface acoustic wave and bulk acoustic wave resonators in different regions of the film, the design achieves miniaturization in the planar dimensions while managing integration complexity through vertical layering.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Reliability

If surface acoustic wave devices are used for low frequency, then performance is improved, but high frequency performance is insufficient

Engineering Contradiction:
Improvelow frequency performanceVSAvoidfrequency range
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent employs a composite resonator structure combining surface acoustic wave and bulk acoustic wave resonators in a single hybrid device. This composite approach leverages the strengths of both technologies: surface acoustic wave resonators for low frequency performance and bulk acoustic wave resonators for high frequency performance, thereby extending the overall frequency range while maintaining reliability.

Inventive Principle:
Principle #40Composite materials

4Reliability

If bulk acoustic wave devices are used for high frequency, then performance is improved, but low frequency performance is insufficient

Engineering Contradiction:
Improvehigh frequency performanceVSAvoidfrequency range
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The hybrid resonator structure combines bulk acoustic wave and surface acoustic wave resonators, allowing the bulk acoustic wave portion to handle high frequency operations with excellent performance while the surface acoustic wave portion complements it for low frequency coverage, achieving broad frequency range adaptability.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables the integration of multiple resonator types on a single substrate, reducing space requirements while ensuring high performance and temperature stability, effectively addressing the need for miniaturization in smartphones.

Implementation Method 1

a piezoelectric film on a surface of the substrate

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

an interdigital electrode located in a first region of a surface of the piezoelectric film facing away from the substrate

Methodology Applied
Scientific EffectSurface acoustic wave generation: Surface Acoustic Wave

Implementation Method 3

a bulk-acoustic-wave propagation portion is formed between adjacent ones of the at least two trenches

Methodology Applied
Scientific EffectBulk acoustic wave propagation: Acoustic Radiation Pressure

Implementation Method 4

there is an air gap at a surface of each of the bulk-acoustic-wave electrodes facing away from the bulk-acoustic-wave propagation portion

Methodology Applied
Scientific EffectAcoustic resonance: Resonance

Data Source

PatentUS10958236B2Hybrid acoustic wave resonator and preparation method therefor
Publication Date: 2021.03.23 EPIC MEMS XIAMEN CO LTD
  • US10958236B2 patent drawing
  • US10958236B2 patent drawing
  • US10958236B2 patent drawing

AI summary

A hybrid acoustic resonator. An interdigital electrode is provided in a first region of a surface of a piezoelectric film facing away from a substrate, and forms an interdigital transducer. At least two trenches are provided in a second region of the surface of the piezoelectric film facing away from the substrate. A bulk-acoustic-wave propagation portion is formed between adjacent trenches. A bulk-acoustic-wave electrode is provided on a side surface of the bulk-acoustic-wave propagation portion, and there is an air gap at a surface of the bulk-acoustic-wave electrode facing away from the bulk-acoustic-wave propagation portion. Thereby, the hybrid acoustic resonator includes both the surface acoustic resonator and the bulk acoustic resonator. An acoustic wave in the bulk-acoustic-wave propagation portion and an acoustic wave in the interdigital transducer are both transmitted along a transversal direction.