Hybrid Rules and Models Analysis for Layout Hotspot Detection
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Solution Overview
Problem
Current manufacturability analysis techniques, either design rule checking (DRC) or models-based approaches, are either inaccurate or computationally expensive, especially for complex designs, necessitating a more efficient method to optimize performance.
Innovation Solution
A hybrid approach integrating rules-based and models-based analysis to identify hotspots in a layout design, using a heat map to prioritize resource allocation for models-based analysis, thereby reducing computational burden and improving yield prediction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If models-based analysis is used to perform manufacturability analysis, then accuracy is improved, but computational cost and execution time increase
Solution Approach 1:
The patent divides the layout design into multiple regions and performs models-based analysis selectively on specific regions of interest rather than the entire design. This segmentation allows the system to maintain high accuracy where needed while reducing overall computational cost by applying simplified rules-based analysis to other areas.
Solution Approach 2:
The system applies different analysis methods to different regions based on their characteristics. Critical regions with potential manufacturing issues receive detailed models-based analysis, while non-critical regions use faster rules-based analysis. This local differentiation optimizes the balance between accuracy and computational efficiency.
2Productivity
If design rule checking is used for manufacturability analysis, then computational cost is reduced, but accuracy deteriorates
Solution Approach 1:
The patent merges rules-based analysis and models-based analysis into a hybrid approach. Rules-based analysis is used for initial screening and identification of potential issues, while models-based analysis is applied to verify and refine the results. This combination leverages the speed of rules-based methods and the accuracy of models-based methods.
Solution Approach 2:
The system performs rules-based analysis as a preliminary step to identify regions of interest before applying more computationally intensive models-based analysis. This preliminary action filters out areas that do not require detailed analysis, reducing overall computational cost while maintaining accuracy in critical regions.
3Reliability
If models-based analysis is applied to entire layout design, then comprehensive yield prediction is achieved, but computational resources are wasted on non-critical areas
Solution Approach 1:
The layout design is segmented into critical and non-critical regions based on initial rules-based analysis results. Models-based analysis is then applied only to critical regions where yield prediction is most important, avoiding unnecessary computational resource consumption in non-critical areas while maintaining comprehensive yield prediction through strategic selection of analysis regions.
Data Source
AI summary
The present invention presents a hybrid approach for manufacturability analysis that integrates both a rules-based approach and a models-based approach. For example, a rules-based analysis can be used to optimize the performance of a model-based analysis. The rules analysis can be used to identify specific areas of a layout that can then be analyzed in detail using models. This approach provides numerous advantages. It allows the models-based analysis tool to concentrate upon portions of the layout that requires greater attention and allocate fewer resources towards the areas less critical to the yield.