Hybrid Sensor for AOI Throughput and Accuracy Trade-off

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Solution Overview

Problem

Automatic optical inspection (AOI) systems face a trade-off between throughput and image quality, as multi-color sensors provide more detailed information but require more complex and time-consuming processing compared to monochromatic sensors.

Innovation Solution

A hybrid sensor system that combines monochromatic and multi-color sensing elements, allowing for the processing of monochromatic images to detect defects initially and selectively processing multi-color images only when necessary, thereby optimizing throughput and accuracy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If multi-color sensors are used to obtain detailed information, then measurement precision is improved, but device complexity and processing time increase

Engineering Contradiction:
Improvedefect detection accuracyVSAvoidsensor processing complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The sensor array is segmented into multiple types of sensing elements (monochromatic, color, and spectral sensors) that can independently capture different aspects of the inspected object. This segmentation allows the system to process only specific portions of the image with complex multi-color analysis, while other portions use simpler monochromatic processing, thereby reducing overall device complexity while maintaining high measurement precision where needed.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the sensor array are assigned different sensing capabilities based on the local requirements of the inspection task. Monochromatic sensors are used for areas requiring high speed and simple processing, while color and spectral sensors are deployed in regions where detailed defect analysis is critical. This local differentiation optimizes the balance between measurement precision and device complexity.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If multi-color sensors are used to obtain detailed information, then measurement precision is improved, but loss of time increases

Engineering Contradiction:
Improvedefect detection accuracyVSAvoidprocessing time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The system applies multi-color and spectral analysis only to specific regions or suspected defect areas rather than processing the entire image with full complexity. The defect detection module identifies areas requiring detailed analysis and applies complex processing only there, while other areas are processed quickly using simpler monochromatic data. This partial application of complex processing significantly reduces overall processing time while maintaining high measurement precision where it matters most.

Inventive Principle:
Principle #16Partial or excessive action

Solution Approach 2:

The system performs preliminary defect detection using fast monochromatic sensing to identify potential defect locations before applying time-consuming multi-color and spectral analysis. This preliminary action filters out areas that do not require detailed analysis, allowing the system to focus computational resources only on suspicious regions and thereby reduce total processing time while maintaining high accuracy.

Inventive Principle:
Principle #10Preliminary action

3Productivity

If monochromatic sensors are used, then productivity is improved, but measurement precision deteriorates

Engineering Contradiction:
Improveinspection throughputVSAvoiddefect detection accuracy
Core Design Contradiction:
ProductivityVSMeasurement precision

Solution Approach 1:

The system merges monochromatic, color, and spectral sensing elements into a single hybrid sensor array, allowing it to simultaneously capture both high-speed monochromatic data for overall inspection throughput and detailed multi-color/spectral data for enhanced defect detection accuracy. The defect detection module intelligently combines information from all sensor types, using monochromatic data for rapid screening and multi-color/spectral data for confirming and characterizing defects, thereby achieving both high productivity and high measurement precision.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The hybrid sensor system enhances defect detection accuracy and reliability while maintaining high throughput by leveraging the strengths of both monochromatic and multi-color imaging, reducing false alarms and improving analysis efficiency.

Implementation Method 1

a monochromatic portion (1310) that may be arranged to obtain a monochromatic image of a first area of an object; wherein the monochromatic portion may include monochromatic sensing elements that sense radiation of a same frequency band

Methodology Applied
Scientific EffectRadiation detection: Photoelectric Effect

Implementation Method 2

a multiple-color portion (1320) that may be arranged to obtain a multi-colored image of a second area of the object; wherein the multiple-color portion may include color sensing elements of different types, wherein different types of color sensing elements are associated with different frequency bands

Methodology Applied
Scientific EffectRadiation detection: Photoelectric Effect

Data Source

PatentUS9042635B2System and a method for inspecting an object using a hybrid sensor
Publication Date: 2015.05.26 CAMTEK LTD
  • US9042635B2 patent drawing
  • US9042635B2 patent drawing
  • US9042635B2 patent drawing

AI summary

A system, that includes a hybrid sensor that comprises: a monochromatic portion that is arranged to obtain a monochromatic image of a first area of an object; a multiple-color portion that is arranged to obtain a multi-colored image of a second area of the object; wherein the monochromatic portion comprises monochromatic sensing elements that sense radiation of a same frequency band; wherein the multiple-color portion comprises color sensing elements of different types, wherein different types of color sensing elements are associated with different frequency bands.