Hybrid Sputter Evaporation Source for Solar Cell Film Precision
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Solution Overview
Problem
Current vacuum processing systems for fabricating solar cells are inadequate in terms of throughput and precision, as they are slower than required by the market and struggle to achieve precise atomic concentrations necessary for high-performance solar cells.
Innovation Solution
A substrate processing system utilizing a combination of sputter deposition sources and evaporation effusion cells in a continuous process, allowing for the formation of precise thin films with high throughput by arranging these sources linearly in the direction of substrate travel, enabling simultaneous processing of multiple substrates and precise control over layer thickness and composition.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If sputtering sources are used for deposition, then film quality and uniformity are improved, but cost increases and target utilization decreases
Solution Approach 1:
The patent combines sputtering sources and evaporation sources into a single hybrid deposition system. The sputtering portion provides controlled deposition for high-quality films, while the evaporation portion adds high utilization and cost-effectiveness, allowing the system to achieve both precision and manufacturing efficiency simultaneously
Solution Approach 2:
The hybrid source is designed to perform multiple functions: it can operate in pure sputtering mode, pure evaporation mode, or combined mode depending on the specific deposition requirements. This multi-functionality allows a single system to replace multiple specialized systems, reducing overall cost while maintaining high film quality
2Manufacturing precision
If traditional semiconductor fabrication equipment is used, then precise atomic concentrations are achieved, but throughput is too slow for solar industry requirements
Solution Approach 1:
The patent transitions from sequential processing to parallel processing by arranging multiple deposition sources side-by-side in the same chamber. Multiple substrates can be processed simultaneously on different carriers, or a single large substrate can be covered by multiple sources working in parallel, thereby increasing throughput while maintaining precision through independent control of each source
Solution Approach 2:
The hybrid deposition system enables continuous deposition processes without the need to switch between different equipment or chambers. The system can maintain steady-state operation with continuous material supply to sources, ensuring uninterrupted film formation and maximizing productivity while preserving atomic concentration precision through stable deposition conditions
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves high precision and throughput in forming thin films for solar cells, specifically enhancing absorber and window layers, thereby improving solar cell performance and meeting market demands for faster fabrication while maintaining cost-effectiveness.
Implementation Method 1
a sputtering module and an evaporation module arranged linearly in the direction of travel of the carriers
Implementation Method 2
a sputtering module and an evaporation module arranged linearly in the direction of travel of the carriers
Data Source
AI summary
A substrate processing system particularly suitable for fabricating solar cells. The system has a front end module transporting cassettes, each cassette holding a preset number of substrates therein; a loading module coupled to the front end module and having mechanism for loading substrates from the cassettes onto carriers; and a plurality of processing chambers coupled to each other in series, each having tracks for transporting the carriers directly from one chamber to the next; wherein selected chambers of the plurality of processing chambers comprise at least one combination source having a sputtering module and an evaporation module arranged linearly in the direction of travel of the carriers.