Hybrid TFT Micro Display Projector Thin-Film Circuit Integration

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Solution Overview

Problem

The integration of light emitting diodes (LEDs) with backplanes in display systems poses challenges due to the complexity of pixel-level interconnects and fabrication processes, affecting the performance of LED displays, particularly in achieving high resolution and efficient electrical connections.

Innovation Solution

A thin-film circuit layer is deposited on an epitaxial structure forming an array of LEDs, with a backplane coupled using a reduced number of metal bonds, incorporating drive circuitry and transistor-based pixel circuits for controlling LED operation, and utilizing materials like c-axis aligned crystal Indium-Gallium-Zinc oxide (CAAC-IGZO) or amorphous silicon for the thin-film circuit layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If a reduced number of metal bonds is used to couple the backplane with the thin-film circuit layer, then the complexity of pixel-level interconnects is reduced, but achieving high resolution and efficient electrical connections becomes more challenging

Engineering Contradiction:
Improvecomplexity of pixel-level interconnectsVSAvoidresolution and electrical connection efficiency
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The invention segments the interconnect structure by introducing a thin-film circuit layer that acts as an intermediate routing layer between the backplane and LED array. This segmentation allows global signals to be distributed through fewer metal bonds to the thin-film circuit layer, which then handles local signal distribution to individual LEDs, thereby reducing backplane complexity while maintaining high-resolution connectivity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention adds a dimensional layer by inserting the thin-film circuit layer between the backplane and LED array. This intermediate layer provides an additional routing dimension, allowing signals to be distributed in a hierarchical manner (global signals to thin-film layer, then local signals to LEDs), reducing the number of direct metal bonds required while preserving connection efficiency

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Extent of automation

If thin-film circuit layer is deposited on LED array, then integration of control circuits is achieved, but fabrication process complexity increases

Engineering Contradiction:
Improveintegration of control circuitsVSAvoidfabrication process complexity
Core Design Contradiction:
Extent of automationVSEase of manufacture

Solution Approach 1:

The invention merges the control circuit functionality directly into the display structure by depositing the thin-film circuit layer on the LED array. This integration combines the LED light-emitting function with the circuit control function in a single integrated structure, enabling automated control while managing fabrication complexity through established thin-film deposition techniques

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The thin-film circuit layer serves as an intermediary between the backplane drive circuitry and the LED array. It provides the necessary control circuit functionality (such as pixel circuits, storage capacitors, and switching transistors) while being fabricated using standard thin-film processes, thus bridging the gap between simple LED arrays and complex integrated displays

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces the number of connections between the LEDs and the backplane, enhancing the performance of LED displays by improving resolution and operational efficiency while maintaining structural support and electrical connectivity.

Implementation Method 1

A thin-film circuit layer is deposited on an epitaxial structure forming an array of LEDs

Methodology Applied
Scientific EffectPhysical Vapour Deposition: Physical Vapour Deposition

Data Source

PatentUS11699773B2Process flow for hybrid TFT-based micro display projector
Publication Date: 2023.07.11 META PLATFORMS TECHNOLOGIES LLC
  • US11699773B2 patent drawing
  • US11699773B2 patent drawing
  • US11699773B2 patent drawing

AI summary

Disclosed herein are techniques for forming a thin-film circuit layer on an array of light-emitting diodes (LEDs). LEDs in the array of LEDs can be singulated by various processes, such as etching and ion implantation. Singulating LEDs can be performed before or after forming the thin-film circuit layer on the array of LEDs. The array of LEDs can be bonded to a transparent or non-transparent substrate.