Hybrid Waveguide Bends for Tight Confinement

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Solution Overview

Problem

Photonic chips with silicon nitride waveguide bends experience higher bending loss and larger footprints due to weak field confinement, leading to increased operational overhead and layout area, compared to those with single-crystal silicon cores.

Innovation Solution

A hybrid heterogeneous waveguide structure is introduced, featuring a waveguide bend composed of single-crystal semiconductor material and an overlapping dielectric waveguide bend with a different radius and curvature, which improves mode confinement and reduces bending loss by coupling with the primary waveguide bend.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If a waveguide bend with silicon nitride core is used, then the waveguide can be fabricated with standard processes, but the field confinement is weak leading to higher bending loss

Engineering Contradiction:
Improvefabrication process compatibilityVSAvoidbending loss
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The patent employs a composite waveguide structure combining silicon nitride core with silicon oxide cladding layers. This composite material approach allows the waveguide to benefit from the low-loss transmission of silicon nitride while the silicon oxide cladding provides enhanced field confinement, thereby reducing bending loss without sacrificing fabrication compatibility

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent modifies the waveguide structural parameters by introducing multiple cladding layers with different thicknesses and refractive indices. By optimizing the cladding layer parameters (thickness, material composition), the field confinement is enhanced, which reduces bending loss while maintaining compatibility with standard fabrication processes

Inventive Principle:
Principle #35Parameter changes

2Device complexity

If a waveguide bend with silicon nitride core is used, then the waveguide structure is simpler to fabricate, but the footprint increases due to larger radius of curvature needed

Engineering Contradiction:
Improvewaveguide structure complexityVSAvoidfootprint
Core Design Contradiction:
Device complexityVSArea of stationary object

Solution Approach 1:

The composite waveguide structure with silicon nitride core and silicon oxide cladding enables tighter bending radii by enhancing field confinement. This allows waveguide bends to achieve the same performance with smaller footprints while maintaining structural simplicity and fabrication ease

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

By optimizing the cladding layer parameters and waveguide geometry, the patent enables reduced bending radii without increasing device complexity. The parameter optimization allows tighter bends that reduce footprint while keeping the waveguide structure relatively simple and compatible with standard fabrication

Inventive Principle:
Principle #35Parameter changes

3Loss of energy

If a waveguide bend with larger radius of curvature is used to compensate for bending loss, then bending loss is reduced, but the footprint of the waveguide bend increases

Engineering Contradiction:
Improvebending lossVSAvoidfootprint
Core Design Contradiction:
Loss of energyVSArea of stationary object

Solution Approach 1:

The patent optimizes the waveguide structural parameters, particularly the cladding layer thickness and refractive index profile, to enhance field confinement. This parameter optimization allows the waveguide to achieve low bending loss with smaller bending radii, thereby reducing footprint without increasing bending loss

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The composite material structure provides enhanced field confinement that allows tighter bends. This enables the waveguide to achieve low bending loss with reduced radius of curvature, thereby minimizing footprint while maintaining low energy loss

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The hybrid structure enhances mode confinement, decreases radiation and mode-mismatching losses, and allows for a reduced bend radius, thereby minimizing footprint and operational overhead.

Implementation Method 1

a portion of the mode field may be pulled outside of the silicon nitride core as optical signals propagate through a waveguide bend, which may lead to a higher bending loss

Methodology Applied
Scientific EffectElectromagnetic field confinement: Waveguide (optics)

Implementation Method 2

A hybrid heterogeneous waveguide structure is introduced, featuring a waveguide bend composed of single-crystal semiconductor material and an overlapping dielectric waveguide bend with a different radius and curvature, which improves mode confinement and reduces bending loss by coupling with the primary waveguide bend

Methodology Applied
Scientific EffectMode coupling: Waveguide (optics)

Data Source

PatentUS10436982B1Waveguide bends with field confinement
Publication Date: 2019.10.08 GLOBALFOUNDRIES US INC
  • US10436982B1 patent drawing
  • US10436982B1 patent drawing
  • US10436982B1 patent drawing

AI summary

Structures including waveguide bends, methods of fabricating a structure that includes waveguide bends, and systems that integrate optical components containing different materials. A first waveguide bend is contiguous with a waveguide, and a second waveguide bend is spaced in a vertical direction from the first waveguide bend. The second waveguide bend has an overlapping arrangement with the first waveguide bend in a lateral direction.