Hydraulic Adjustment Assembly for Lithography Position Stability
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate exposure systems, such as lithography and microscopy systems, face challenges with position adjustments due to creep in spring elements, limited load capacity of contactless motors, and difficulty in accessing components within complex, compact configurations, leading to performance deviations and disturbances in charged particle systems.
Innovation Solution
A hydraulic adjustment assembly with a hydraulic actuator and generator, connected by a conduit, is introduced to adjust the position of the exposure apparatus with respect to the substrate support module, utilizing a hydraulic system that is remotely controlled and capable of carrying high loads, thus minimizing the need for electrical signals and avoiding disturbances in charged particle systems.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If spring elements are used to support the exposure apparatus, then vibration isolation is improved, but position stability deteriorates due to creep over time
Solution Approach 1:
A hydraulic actuator is introduced as an intermediary between the spring element and the exposure apparatus. The spring element continues to provide vibration isolation, while the hydraulic actuator compensates for position deviations caused by creep, thus resolving the contradiction between vibration isolation and position stability
Solution Approach 2:
A feedback control system is implemented where sensors detect position deviations of the exposure apparatus and send signals to the hydraulic actuator, which then adjusts the position to maintain accuracy, counteracting the creep effect of the spring element
2Ease of operation
If contactless motors are used for position adjustment, then ease of operation is improved, but load capacity deteriorates
Solution Approach 1:
The patent replaces contactless motors with a hydraulic actuator system. The hydraulic actuator uses fluid pressure to generate force, providing significantly higher load capacity while maintaining ease of operation through remote hydraulic control
Solution Approach 2:
A hydraulic system is used to actuate the adjustment mechanism. The hydraulic fluid transmits force efficiently, enabling the system to handle heavy loads while allowing remote adjustment without direct mechanical contact
3Volume of moving object
If components are arranged in compact configurations, then space utilization is improved, but ease of repair deteriorates due to difficult access
Solution Approach 1:
The hydraulic control system is extracted from the compact internal arrangement and placed in an external location. The hydraulic actuator remains inside the compact configuration, while the control mechanisms and fluid reservoirs are positioned externally, allowing easy access for maintenance while maintaining compact internal space
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The hydraulic system effectively compensates for position deviations caused by creep, provides a stiff support, and allows for remote adjustment of components within the system, enhancing the performance and accuracy of substrate exposure systems while maintaining a controlled environment.
Implementation Method 1
A hydraulic adjustment assembly with a hydraulic actuator and generator, connected by a conduit, is introduced to adjust the position of the exposure apparatus
Data Source
AI summary
The invention relates to a substrate exposure system comprising a frame, a substrate support module for carrying a substrate, an exposure apparatus for exposing said substrate, and adjustment assembly for adjusting the position of the exposure apparatus with respect to the substrate support module. The adjustment assembly comprises a hydraulic actuator, a hydraulic generator and a conduit, wherein the conduit interconnects said hydraulic actuator and said hydraulic generator for forming a hydraulic system. The exposure apparatus, the frame, the adjustment assembly and the substrate support module are arranged as parts of a series of mechanically linked components. A first part of said series of mechanically linked components comprises the exposure apparatus, and a second part comprises the substrate support module. Said hydraulic actuator is arranged between said first part and said second part. Preferably the hydraulic actuator comprises a first bellows and the hydraulic generator comprises a second bellows.