Hydraulic Bellows Alignment for Stable Substrate Exposure
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Solution Overview
Problem
Existing substrate exposure systems face challenges such as positional deviations due to creep in spring elements, limited load capacity of contactless motors, and difficulty in adjusting components in complex, compact systems, especially in environments with vibrations and electrically sensitive charged particle exposure systems.
Innovation Solution
A mechanical adjustment assembly using a hydraulic system with bellows and conduits to remotely adjust the position of components, allowing for high load capacity and precise positioning without electrical interference, utilizing a hydraulic actuator and generator to compensate for positional deviations and creep.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If spring elements are used to support the exposure apparatus, then vibration isolation is improved, but positional stability deteriorates due to creep over time
Solution Approach 1:
The system dynamically adjusts the hydraulic pressure in the bellows actuator to compensate for creep-induced positional deviations. The position sensor continuously monitors the exposure apparatus position, and the control unit modifies the hydraulic pressure in real-time to maintain the optimal position despite spring element creep over time.
Solution Approach 2:
A feedback control loop is implemented using a position sensor to detect the actual position of the exposure apparatus and a control unit that compares this with the optimal position. The control unit adjusts the hydraulic pressure accordingly to eliminate positional deviations caused by spring creep, ensuring long-term positional stability.
2Ease of operation
If contactless motors are used to move the exposure apparatus, then ease of operation is improved, but load capacity deteriorates
Solution Approach 1:
The system uses a hydraulic actuator with bellows that can generate high forces to move the heavy exposure apparatus. The hydraulic system provides sufficient load capacity while the entire assembly can be positioned using a single motor that adjusts the internal hydraulic pressure, maintaining ease of operation.
3Volume of moving object
If components are arranged in a compact enclosed system, then space efficiency is improved, but adjustability deteriorates due to difficult access
Solution Approach 1:
The adjustment system is segmented into two functional parts: a hydraulic actuator with bellows inside the compact enclosure for space efficiency, and an external hydraulic pressure adjustment mechanism for ease of operation. This segmentation allows the system to maintain compactness while enabling accessible adjustment of the exposure apparatus position.
Solution Approach 2:
Hydraulic fluid acts as an intermediary medium that transmits force from the externally accessible pressure adjustment mechanism to the internally located bellows actuator. This allows operators to adjust components inside the compact enclosure without direct access to the internal adjustment mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The hydraulic system enables remote, precise adjustment of components within the substrate exposure system, effectively counteracting positional deviations and creep, while maintaining system performance and avoiding electrical interference, thus enhancing the accuracy and stability of the exposure process.
Implementation Method 1
a conduit (73) interconnecting said first bellows (71) and said second bellows (72) for forming a hydraulic system
Data Source
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AI summary
The invention relates to a substrate exposure system comprising a frame, a substrate support module for carrying a substrate, an exposure apparatus for exposing said substrate, and adjustment assembly for adjusting the position of the exposure apparatus with respect to the substrate support module. The adjustment assembly comprises a hydraulic actuator, a hydraulic generator and a conduit, wherein the conduit interconnects said hydraulic actuator and said hydraulic generator for forming a hydraulic system. The exposure apparatus, the frame, the adjustment assembly and the substrate support module are arranged as parts of a series of mechanically linked components. A first part of said series of mechanically linked components comprises the exposure apparatus, and a second part comprises the substrate support module. Said hydraulic actuator is arranged between said first part and said second part. Preferably the hydraulic actuator comprises a first bellows and the hydraulic generator comprises a second bellows.