Electronic Grade Hydrofluoric Acid Purification via Evaporation and Absorption

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Solution Overview

Problem

Current methods for producing electronic grade hydrofluoric acid face challenges in achieving high purity, low cost, and environmental sustainability, often introducing impurities and incurring high production costs, with waste disposal contributing to environmental pollution.

Innovation Solution

A production device and method involving a purification system with a raw material tank, evaporator, purification tower, absorption tower, and tail gas absorption system using desalinated water to recover hydrogen fluoride gas, along with a raffinate treatment system to produce high-purity electronic grade hydrofluoric acid without additional impurities, and utilizing the byproducts to create industrial grade hydrofluoric acid.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional production methods (rectification, sub-boiling distillation, vacuum distillation, gas absorption) are used, then electronic grade hydrofluoric acid can be produced, but the methods either introduce new impurities, have low yields, or incur high production costs

Engineering Contradiction:
Improvepurity of hydrofluoric acidVSAvoidproduction cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The production process is divided into multiple distinct stages: evaporation to convert liquid HF to gas, purification to remove impurities, condensation to convert gas back to liquid, and absorption to achieve final high purity. Each stage targets specific impurity removal mechanisms, allowing systematic purification without requiring expensive single-step processes

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The process utilizes changes in physical parameters (temperature, pressure, phase state) to achieve purification. By controlling evaporation temperature and condensation conditions, the method selectively separates HF from impurities based on their different volatility and condensation characteristics, achieving high purity without additional chemical reagents that would increase cost

Inventive Principle:
Principle #35Parameter changes

2Productivity

If conventional production methods are used, then hydrofluoric acid production can proceed, but waste is produced that pollutes the environment and increases disposal costs

Engineering Contradiction:
Improveproduction efficiencyVSAvoidenvironmental pollution from waste
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The purification process converts what would be waste streams into valuable products. Impurities removed during purification are separated into distinct fractions that can be processed and reused. The absorption step captures any remaining HF gas that would otherwise be emitted, converting it into additional product rather than releasing it as pollution

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The method systematically recovers materials that would normally be discarded. The multi-stage purification separates and recovers HF at different purity levels for different applications. Waste heat from condensation is utilized, and absorption towers capture escaped HF gas, converting all waste streams into recoverable resources that reduce environmental impact and disposal costs

Inventive Principle:
Principle #34Discarding and recovering

3Manufacturing precision

If high-purity production methods are used, then electronic grade hydrofluoric acid with required purity can be achieved, but the yield is reduced and production costs increase

Engineering Contradiction:
Improvepurity of hydrofluoric acidVSAvoidyield of hydrofluoric acid
Core Design Contradiction:
Manufacturing precisionVSLoss of substance

Solution Approach 1:

The process maintains continuous operation without interruption. The evaporation-purification-condensation-absorption sequence operates continuously, with each stage feeding into the next without batch interruptions. This continuous flow minimizes material losses that occur during batch processing, heating, and cooling cycles, while maintaining high purity through consistent parameter control

Inventive Principle:
Principle #20Continuity of useful action

Solution Approach 2:

The absorption towers serve multiple functions: they act as the final purification stage to achieve electronic grade purity, simultaneously serve as safety devices to capture any escaped HF gas, and function as yield recovery units by converting all gaseous HF back into liquid product. This multi-functionality ensures high purity without sacrificing yield

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method achieves high yield and quality electronic grade hydrofluoric acid with reduced environmental pollution and resource waste, enabling the production of 25,000 tons annually while providing economic benefits and environmental protection.

Implementation Method 1

transporting the pressurized hydrofluoric acid to the evaporator for gasification

Methodology Applied
Scientific EffectEvaporation: Evaporation

Implementation Method 2

processing, by the purification tower, the gasified hydrogen fluoride and obtaining high purity hydrogen fluoride gas

Methodology Applied
Scientific EffectDistillation: Distillation

Implementation Method 3

entering the high purity hydrogen fluoride gas into the absorption tower... discharging the transferred hydrofluoric acid from a bottom output of the absorption tower

Methodology Applied
Scientific EffectAbsorption: Absorption (physical)

Implementation Method 4

a first cooler connected to a top of the absorption tower

Methodology Applied
Scientific EffectCondensation: Condensation

Implementation Method 5

a second cooler connected to the first tail gas absorption tower

Methodology Applied
Scientific EffectCondensation: Condensation

Implementation Method 6

a third cooler, a hydrofluoric acid cycle storage tank, and a fifth delivery pump connected sequentially

Methodology Applied
Scientific EffectCondensation: Condensation

Data Source

PatentUS11325063B2Production device and production method of electronic grade hydrofluoric acid
Publication Date: 2022.05.10 BEIJING UNIV OF CHEM TECH
  • US11325063B2 patent drawing

AI summary

Disclosed is a production device and production method of electronic grade hydrofluoric acid. The method includes vaporizing the raw material industrial anhydrous hydrogen fluoride by an evaporator, transporting the vaporized hydrogen fluoride to a purification tower, obtaining a high purity hydrogen fluoride gas through rectification, transporting the high purity hydrogen fluoride gas to an absorption tower for absorption by a certain concentration of hydrofluoric acid in the liquid phase, obtaining the crude electronic grade hydrofluoric acid, and obtaining the electronic grade hydrofluoric acid product through ultrapure filtration. The disclosure overcomes the technical problems of small yield and low purity of the prior art. The production process meets the requirements of environmental protection. The disclosure is suitable for industrialized large-scale production.