On-Site Hydrogen Generation for Ion Implantation Cooling
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Solution Overview
Problem
Conventional ion implantation systems face temperature control errors due to reliance on the temperature of the workpiece support, and safety concerns arise from the use of high-pressure hydrogen gas bottles for cooling, which can lead to explosion risks.
Innovation Solution
A gas generation system that produces hydrogen gas on-site for use as a backside gas in an ion implantation system, incorporating a hydrogen generator, sensors for gas detection, an exhaust system to prevent hydrogen buildup, and an interlock system to control hydrogen release, ensuring safe and efficient temperature control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If high-pressure hydrogen gas bottles are used for cooling, then cooling efficiency is improved, but safety risks worsen due to explosion hazards
Solution Approach 1:
The patent extracts the hydrogen storage function from high-pressure gas bottles and replaces it with an on-site hydrogen generation system. The hydrogen is generated locally through electrolysis of water using a power supply and electrodes, eliminating the need for storing high-pressure hydrogen bottles while maintaining the cooling function. This directly resolves the safety issue by removing the explosion hazard source.
Solution Approach 2:
The patent introduces water as an intermediary substance to generate hydrogen on-site. Instead of directly using stored hydrogen gas, water is electrolyzed to produce hydrogen at the point of use. This intermediary approach allows controlled hydrogen generation without the safety risks of storing pressurized hydrogen bottles.
2Device complexity
If conventional temperature control methods are used, then system simplicity is maintained, but temperature precision worsens due to reliance on workpiece support temperature
Solution Approach 1:
The patent introduces hydrogen gas as a thermal intermediary between the cooled chuck and the workpiece backside. The hydrogen gas layer provides efficient thermal coupling, allowing more precise temperature control of the workpiece. This intermediary gas layer enables better temperature precision while maintaining relatively simple system architecture.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enhances temperature precision and safety by reducing thermal resistance with hydrogen's higher conductivity, mitigating explosion risks through on-site gas generation and controlled hydrogen release, thereby improving the ion implantation process.
Implementation Method 1
hydrogen's higher conductivity
Data Source
AI summary
A gas generation system for an ion implantation system has a hydrogen generator configured to generate hydrogen gas within an enclosure. A chuck, such as an electrostatic chuck, supports a workpiece in an end station of the ion implantation system, and a delivery system provides the hydrogen gas to the chuck. The hydrogen gas can be provided through the chuck to a backside of the workpiece. Sensors can detect a presence of the hydrogen gas within the enclosure. A controller can control the hydrogen generator. An exhaust system can pass air through the enclosure to prevent a build-up of the hydrogen gas within the enclosure. A purge gas system provides a dilutant gas to the enclosure. An interlock system can control the hydrogen generator, delivery system, purge gas system, and exhaust system to mitigate hydrogen release based on a signal from the one or more sensors.