Hydrogen-Occluding Catalyst for Dissolved Oxygen Removal in IPA
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Solution Overview
Problem
Current methods for removing dissolved oxygen from isopropyl alcohol (IPA) require increased vacuum pump capacity or reduced chemical treatment, leading to increased space and power consumption, and do not effectively address the oxidization issues in semiconductor manufacturing as devices become more advanced.
Innovation Solution
A device using a hydrogen-occluding metal catalyst, where IPA is brought into contact with the catalyst to react with occluded hydrogen and dissolved oxygen, forming water, thereby efficiently removing dissolved oxygen with a simple configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Quantity of substance
If vacuum degasifier or membrane degasifier is used to remove dissolved oxygen from ultrapure water, then dissolved oxygen concentration is reduced to equal to or less than 10 ppb (or 1 ppb), but device complexity and space requirement increase
Solution Approach 1:
The invention extracts and removes the harmful dissolved oxygen from the liquid by introducing a hydrogen-containing gas that reacts with oxygen to form water, which is then removed. This extraction approach eliminates the need for complex vacuum or membrane systems while achieving the same oxygen removal effect.
Solution Approach 2:
The hydrogen-containing gas acts as an intermediary substance that mediates the removal of dissolved oxygen. By introducing hydrogen that reacts with oxygen to form water, the system achieves oxygen removal without requiring direct vacuum or membrane contact, simplifying the overall device structure.
2Quantity of substance
If vacuum pump capacity is increased to remove dissolved oxygen from alcohol, then dissolved oxygen concentration is reduced, but space for installation and electric power consumption increase
Solution Approach 1:
The invention replaces the mechanical vacuum pump system with a chemical reaction-based oxygen removal system. By introducing hydrogen-containing gas that chemically reacts with dissolved oxygen, the system eliminates the need for high-power vacuum pumps, significantly reducing energy consumption while maintaining effective oxygen removal.
3Quantity of substance
If vacuum pump capacity is increased to remove dissolved oxygen from alcohol, then dissolved oxygen concentration is reduced, but space for installation increases
Solution Approach 1:
The invention extracts dissolved oxygen through chemical reaction with hydrogen-containing gas introduced into the alcohol system. This extraction method eliminates the need for large vacuum pump equipment, reducing installation space requirements while achieving effective oxygen removal from the alcohol.
4Device complexity
If dissolved oxygen in IPA is not controlled, then device configuration remains simple, but oxidization of semiconductor devices occurs and yields decrease
Solution Approach 1:
The hydrogen-containing gas serves as an intermediary that prevents oxidization of semiconductor devices by reacting with dissolved oxygen in the IPA. This mediator approach maintains simple device configuration while effectively eliminating the harmful oxidization effect that would otherwise occur.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for efficient removal of dissolved oxygen in IPA, reducing oxidization risks in semiconductor manufacturing while minimizing space and power requirements, and maintaining precise IPA concentration for improved yields.
Implementation Method 1
a hydrogen-occluding metal catalyst in which hydrogen is occluded
Implementation Method 2
the dissolved oxygen in the alcohol and hydrogen occluded in the hydrogen-occluding metal catalyst generate water on the surface of the hydrogen-occluding metal catalyst which occludes hydrogen (2H2+O2->2H2O)
Data Source
AI summary
Dissolved oxygen in alcohol is efficiently removed with a simple configuration. Device for removing dissolved oxygen in alcohol has a hydrogen-occluding metal catalyst in which hydrogen is occluded, the catalyst being charged in a device. Dissolved oxygen is removed from alcohol that contains the dissolved oxygen by bringing the alcohol into contact with the hydrogen-occluding metal catalyst. A method of removing dissolved oxygen in alcohol has removing dissolved oxygen from alcohol that contains the dissolved oxygen by bringing the alcohol into contact with a hydrogen-occluding metal catalyst which occludes hydrogen.