Display Device With Hydrogen-Assisted Oxide Wiring

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Solution Overview

Problem

The conductivity variation in metal oxide thin film transistors affects the resolution of display devices, limiting the design freedom and causing luminance non-uniformity.

Innovation Solution

Incorporating an inorganic pattern with high hydrogen content below the oxide-based active layer to enhance conductivity during a heat treatment process, allowing the active layer to be used as wiring and increasing design freedom.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If metal oxide thin film transistor is used, then manufacturing process is simplified, but conductivity variation occurs affecting resolution

Engineering Contradiction:
Improvemanufacturing processVSAvoidconductivity uniformity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent introduces an inorganic pattern specifically at the conductor portion location where conductivity enhancement is most needed. This localized approach allows the metal oxide thin film transistor to benefit from improved conductivity in critical areas while maintaining the overall simplicity of the metal oxide manufacturing process. The inorganic pattern is strategically positioned to overlap with the gate electrode, providing targeted conductivity improvement without requiring changes to the entire transistor structure.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent combines metal oxide material with inorganic material in a composite structure. The metal oxide thin film transistor serves as the base structure, while the inorganic pattern acts as an additional functional layer that enhances conductivity. This composite approach allows the device to leverage the manufacturing simplicity of metal oxide while adding the conductivity enhancement capability of inorganic materials in a synergistic manner.

Inventive Principle:
Principle #40Composite materials

2Reliability

If inorganic pattern is added to enhance conductivity, then conductivity improves, but device structure becomes more complex

Engineering Contradiction:
ImproveconductivityVSAvoidstructure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the inorganic pattern with the existing metal oxide thin film transistor structure by positioning the inorganic pattern to overlap with the gate electrode region. This integration allows the inorganic material to enhance conductivity without requiring a completely separate structural system. The inorganic pattern is incorporated into the existing layer architecture, minimizing additional structural complexity while achieving the desired conductivity improvement.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

By localizing the inorganic pattern to specific regions where conductivity enhancement is most critical (such as the conductor portion and gate electrode overlap areas), the patent avoids the need to modify the entire device structure. This localized approach reduces the overall structural complexity compared to a uniform modification of the entire transistor, while still achieving reliable conductivity improvement in the essential regions.

Inventive Principle:
Principle #3Local quality

3Adaptability or versatility

If design freedom is increased by using active layer as wiring, then adaptability improves, but conductivity control becomes more difficult

Engineering Contradiction:
Improvedesign freedomVSAvoidconductivity control
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The patent utilizes parameter changes by controlling the hydrogen content in the inorganic pattern to regulate conductivity. By adjusting the hydrogen concentration in the inorganic material, the conductivity of the active layer can be precisely controlled when used as wiring. This parameter-based control mechanism allows designers to achieve varying conductivity levels without compromising the structural simplicity or manufacturing ease of the metal oxide thin film transistor architecture.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Improves conductivity and reduces luminance non-uniformity, enhancing the reliability and resolution of display devices.

Implementation Method 1

improving conductivity of an active layer, which overlaps an inorganic pattern, in a heat treatment process

Methodology Applied
Scientific EffectHeat treatment: Heat Treatment

Implementation Method 2

The second active layer includes a conductor portion disposed between a portion of the first gate layer and the inorganic pattern

Methodology Applied
Scientific EffectHydrogen diffusion: Diffusion

Data Source

PatentEP3955298B1Display device
Publication Date: 2025.09.10 SAMSUNG DISPLAY CO LTD
  • EP3955298B1 patent drawingFigure 1
  • EP3955298B1 patent drawingFigure 2
  • EP3955298B1 patent drawingFigure 3

AI summary

Provided is a display device. The display device comprises a first active layer disposed on a substrate and made of a first material, a second active layer disposed on the first active layer and made of a second material different from the first material, a first gate layer disposed on the second active layer, and an inorganic pattern disposed below the second active layer and overlapping a portion of the first gate layer. The second active layer includes a conductor portion disposed between a portion of the first gate layer and the inorganic pattern.