Hydrogen Peroxide Purification Using Reverse Osmosis and Electrodeionization
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing hydrogen peroxide solutions contain high levels of inorganic and organic impurities, particularly cations, anions, and total organic carbon (TOC), which are unsuitable for high-purity applications like semiconductor wafer cleaning and etching due to contamination risks.
Innovation Solution
A purification process combining reverse osmosis membrane treatment and electrodeionization, using membranes like polyamide, cellulose, polypiperazine, or polysulfone, to reduce impurities such as nitrates, sodium, and TOC to less than 1 ppm, ensuring high purity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional synthesis processes (e.g., anthraquinone process) are used to produce hydrogen peroxide, then production cost and efficiency are maintained, but the solution contains high levels of inorganic and organic impurities that are unsuitable for electronics applications
Solution Approach 1:
The purification process is divided into three distinct stages: reverse osmosis treatment, electrodeionization treatment, and mixed bed treatment. Each stage targets specific types of impurities, with reverse osmosis removing larger molecules and particles, electrodeionization removing ions, and mixed bed removing remaining impurities. This segmentation allows systematic removal of different impurity types while maintaining process efficiency.
Solution Approach 2:
The patent introduces intermediate treatment steps between the conventional synthesis process and the final product. The reverse osmosis membrane acts as an intermediary to pre-concentrate and pre-purify the solution before electrodeionization, reducing the load on subsequent treatment stages and improving overall efficiency.
2Manufacturing precision
If multiple purification treatments are applied to reduce impurity levels, then purity increases to suitable levels for electronics, but processing time and operational complexity increase
Solution Approach 1:
The reverse osmosis treatment is performed as a preliminary action before electrodeionization and mixed bed treatment. This pre-treatment removes a significant portion of impurities and concentrates the solution, reducing the burden on subsequent treatment stages and enabling faster processing in later steps.
Solution Approach 2:
The purification process is designed as a continuous flow system where the output of one treatment stage immediately becomes the input of the next. The hydrogen peroxide solution continuously flows through reverse osmosis, then electrodeionization, then mixed bed treatment without interruption, maximizing processing efficiency and minimizing idle time.
3Ease of operation
If hydrogen peroxide is transported and stored in contact with metal surfaces, then logistics are simplified, but metal impurities contaminate the solution
Solution Approach 1:
The purification process extracts and removes metal impurities through specific treatment stages. The electrodeionization treatment uses ion-exchange membranes to selectively remove metal cations, and the mixed bed treatment removes remaining metal impurities, ensuring the final product is free from metal contamination despite contact with metal surfaces during transportation and storage.
4Manufacturing precision
If conventional purification methods are used, then process simplicity is maintained, but impurity reduction is insufficient for electronics applications
Solution Approach 1:
Each purification stage is designed with specific local quality characteristics tailored to remove particular types of impurities. The reverse osmosis membrane has specific pore sizes and charge characteristics for removing organic impurities, the electrodeionization membranes are selective for cations or anions, and the mixed bed contains specific resin types. This localized optimization ensures maximum impurity removal efficiency at each stage.
Solution Approach 2:
The purification system uses composite approaches combining different separation mechanisms: reverse osmosis membranes combining physical filtration and charge-based separation, electrodeionization combining ion exchange and electrochemical processes, and mixed bed combining multiple resin types. This composite approach achieves superior purification that neither method could accomplish alone.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The process achieves a 95-99% reduction in impurities, enabling safe use in electronics without affecting wafer quality, and allows safe transportation and storage of hydrogen peroxide solutions.
Implementation Method 1
at least one treatment on a reverse osmosis membrane
Implementation Method 2
at least one electrodeionization treatment
Data Source
AI summary
The present invention relates to a process for the purification of an aqueous hydrogen peroxide solution, comprising at least one treatment on a reverse osmosis membrane and at least one electrodeionization treatment. The invention also relates to a process for the preparation of an aqueous hydrogen peroxide solution, comprising at least one stage of synthesis of an aqueous hydrogen peroxide solution, at least one treatment on a reverse osmosis membrane and at least one electrodeionization treatment of said solution. The invention also relates to an aqueous hydrogen peroxide solution capable of being obtained by the purification process or the preparation process, as are defined above.