Hydrogen Sensor Membrane Resonance for Precise Stress Detection
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Solution Overview
Problem
Existing hydrogen measurement technologies lack accuracy and reliability, particularly in detecting mechanical stress changes induced by hydrogen contact, which is crucial for safety and functionality applications.
Innovation Solution
A semiconductor device with a sensor chip featuring a hydrogen-active sensor layer that changes mechanical stress upon hydrogen contact, utilizing a membrane excited by a periodic signal to detect stress changes, and a MEMS chip structure to enhance measurement precision.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a sensor layer is used to detect hydrogen concentration, then measurement capability is provided, but measurement accuracy and reliability are insufficient
Solution Approach 1:
The patent employs mechanical vibration of a membrane structure to enhance the detection of hydrogen-induced stress changes. By vibrating the membrane at specific frequencies and detecting changes in vibration characteristics (such as resonant frequency shifts and Q-factor), the system achieves more accurate and reliable measurement of hydrogen concentration, directly addressing the insufficient accuracy and reliability problem.
Solution Approach 2:
The patent utilizes changes in mechanical stress parameters of the sensor layer when exposed to hydrogen. The sensor layer's stress state changes in response to hydrogen concentration, and these parameter changes are detected through the membrane's vibration characteristics. This parameter-based detection approach improves both measurement accuracy and reliability by providing a more sensitive and stable detection mechanism.
2Measurement precision
If membrane structures with large area are used to detect stress changes, then detection sensitivity is improved, but device complexity increases
Solution Approach 1:
The membrane structure serves multiple functions simultaneously: it acts as both the sensing element for stress detection and the mechanical resonator for vibration-based measurement. This multi-functionality reduces device complexity by eliminating the need for separate detection components, while still providing high sensitivity through the membrane's large area.
Solution Approach 2:
The patent replaces complex electronic sensing mechanisms with a mechanical vibration-based detection system. By using the membrane's mechanical properties (vibration frequency and damping) as the sensing mechanism, the system achieves high sensitivity without requiring complex electronic components, thus reducing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Improves measurement accuracy and enables reliable detection of hydrogen concentration by detecting changes in membrane properties such as resonant frequency and Q-factor, providing a cost-effective and scalable solution.
Implementation Method 1
hydrogen can change the mechanical stress in a layer, e.g., owing to diffusion and/or adsorption
Implementation Method 2
hydrogen can change the mechanical stress in a layer, e.g., owing to diffusion and/or adsorption
Implementation Method 3
A further group of H2-active materials which can be used for the sensor layer has so-called swelling effects upon contact with hydrogen
Implementation Method 4
The sensor is configured to detect the change in the mechanical stress of the sensor layer by way of a membrane, wherein for detection purposes provision is made for exciting the membrane using a periodic signal
Implementation Method 5
The membrane has an area having the ability to oscillate. The change in at least one property of the membrane can be detected well using the excitation of the membrane with the periodic signal
Data Source
AI summary
The application relates to a semiconductor device (20) for measuring hydrogen including a sensor chip (10), which has a sensor including a sensor layer (14), which changes its mechanical stress upon contact with hydrogen, wherein the sensor is configured to detect the change in the mechanical stress of the sensor layer (14) by way of a membrane (15), wherein for detection purposes provision is made for exciting the membrane (15) using a periodic signal. The application furthermore relates to a method for measuring a hydrogen concentration.