Hydrogen Sensor Nanowire Structure for Fast Low-Power Detection
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Solution Overview
Problem
Conventional hydrogen gas sensors, particularly those with Pd thin films, face challenges in sensitivity, response/recovery speed, and power consumption, limiting their practical application.
Innovation Solution
A hydrogen gas sensor utilizing a nanowire made of specific hydrogen storage metals like palladium, with defined linewidth and thickness, configured to connect two pad electrodes, allowing for improved sensitivity and response/recovery characteristics with low power consumption.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If Pd thin film is used as hydrogen gas detector, then the sensor structure is simple and easy to manufacture, but the sensitivity and response/recovery speed are insufficient
Solution Approach 1:
The patent segments the continuous Pd thin film into discrete nanowire structures with specific dimensions (50-150 nm linewidth, 10-60 nm thickness). This segmentation creates high surface-area-to-volume ratio and facilitates hydrogen diffusion pathways, thereby improving sensitivity and response/recovery speed while maintaining the fundamental thin-film detection principle
Solution Approach 2:
The patent changes the geometric parameters of the Pd detector from conventional thin film dimensions to nanowire dimensions (linewidth: 50-150 nm, thickness: 10-60 nm). These parameter changes optimize hydrogen occlusion/desorption kinetics and electron transport properties, leading to improved sensitivity and faster response characteristics
2Speed
If conventional Pd thin film sensor is used, then the manufacturing process is simple, but the response/recovery speed is slow
Solution Approach 1:
The continuous Pd film is segmented into nanowires with controlled dimensions, creating multiple independent hydrogen diffusion pathways. This segmentation reduces the effective diffusion distance for hydrogen atoms and accelerates both response and recovery kinetics
Solution Approach 2:
The patent employs ultra-thin Pd nanowire structures (10-60 nm thickness) that provide flexible hydrogen absorption/desorption interfaces. The thin-film nature of the nanowires enables rapid hydrogen permeation while maintaining structural integrity during cyclic operation
3Measurement precision
If Pd thin film with larger area is used to improve sensitivity, then the sensitivity increases, but the power consumption increases
Solution Approach 1:
The patent uses ultra-thin Pd nanowire films (10-60 nm thickness) that require minimal energy for hydrogen diffusion and phase transitions. The thin-film structure reduces the energy barrier for hydrogen occlusion/desorption processes, enabling high sensitivity operation at low power consumption
Solution Approach 2:
By changing the dimensional parameters to nanowire scale, the patent optimizes the balance between sensitivity and power consumption. The small cross-sectional area reduces the total hydrogen storage capacity, lowering the energy required for hydrogen uptake/release cycles, while the high surface-area-to-volume ratio maintains detection sensitivity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The nanowire-based sensor achieves high sensitivity, excellent response/recovery characteristics, and low power consumption, capable of detecting hydrogen gas effectively even at low concentrations and temperatures.
Implementation Method 1
the occlusion and desorption of hydrogen in and from the nanowire occur easily
Implementation Method 2
passing a current between the first pad electrode and the second pad electrode
Data Source
Figure 1A~1B
Figure 1C~1D
Figure 2~4
AI summary
A hydrogen gas sensor that has high sensitivity and excellent response/recovery characteristics, and can detect hydrogen gas with low power consumption is provided. A hydrogen gas sensor 100 according to this disclosure has a substrate 10 having an insulating surface, first and second pad electrodes 12A and 12B formed on the insulating surface of the substrate 10, and a nanowire 14. The nanowire 14 made of a hydrogen storage metal is formed on the insulating surface of the substrate 10 to connect the first and second pad electrodes 12A and 12B, and has a linewidth of 50 nm or more and 150 nm or less, and a thickness of 10 nm or more and 60 nm or less. The hydrogen gas sensor 100 detects hydrogen gas based on variations in an electric signal detected between the first and second pad electrodes 12A and 12B by passing a current between the first and second pad electrodes 12A and 12B.