Hydrogen Sensor Film with Protrusions for Ultra-Trace Detection

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Solution Overview

Problem

Current sensors face challenges in detecting trace amounts of gases like hydrogen with high sensitivity and low power consumption, particularly in efficiently incorporating and detecting hydrogen due to limitations in surface area and reaction rates.

Innovation Solution

A sensor design featuring a first film with a first region and a second region including protrusions, where the second region acts as a catalyst layer with increased surface area, allowing for efficient hydrogen detection through changes in film volume and electrostatic capacitance, utilizing materials like Pd, Pt, and Au, and manufacturing methods that create a turf-like nanostructure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of moving object

If a conventional flat film structure is used, then the device complexity is low, but the surface area is insufficient for detecting ultra-trace hydrogen levels

Engineering Contradiction:
Improvesurface area of filmVSAvoidstructure complexity
Core Design Contradiction:
Area of moving objectVSDevice complexity

Solution Approach 1:

The patent transforms the flat two-dimensional film structure into a three-dimensional structure with protrusions extending outward. This dimensional change increases the surface area available for hydrogen detection without significantly complicating the manufacturing process, as the protrusions are formed through controlled ashing of a layered structure.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent creates a turf-like structure with protrusions that effectively increases the surface area and creates porous regions. This porous morphology provides more active sites for hydrogen incorporation and catalytic reactions, enhancing detection sensitivity for ultra-trace hydrogen levels.

Inventive Principle:
Principle #31Porous materials

2Measurement precision

If the surface area is increased to improve detection sensitivity, then the detection precision improves, but the power consumption increases

Engineering Contradiction:
Improvedetection sensitivityVSAvoidpower consumption
Core Design Contradiction:
Measurement precisionVSUse of energy by moving object

Solution Approach 1:

The patent applies local quality by creating a layered structure where the first layer contains catalyst materials (Pd, Pt, or Au) concentrated in specific regions. This localized catalytic activity enhances hydrogen reaction efficiency at the protrusion tips, improving detection sensitivity without requiring uniform material distribution that would increase overall power consumption.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent uses composite materials by combining a base film material with catalyst materials (Pd, Pt, or Au) in a layered configuration. This composite structure leverages the catalytic properties of precious metals only where needed, enhancing detection sensitivity while minimizing material costs and power consumption compared to using catalyst materials throughout the entire film.

Inventive Principle:
Principle #40Composite materials

3Productivity

If a catalyst layer is added to enhance reaction efficiency, then the productivity of hydrogen detection improves, but the device complexity increases

Engineering Contradiction:
Improvereaction efficiencyVSAvoidlayer structure complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The patent applies preliminary action by pre-forming a layered structure with catalyst materials before the ashing process. The specific layering (first layer with catalyst, second layer as base material) is prepared in advance, and the subsequent ashing automatically creates the protruding turf-like structure with embedded catalysts, eliminating the need for complex post-processing steps to create the catalytic structure.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent replaces complex mechanical or chemical processing methods with a simplified thermal ashing process. Instead of using complex techniques to create protrusions and embed catalysts, the patent uses controlled ashing of a pre-formed layered structure, which automatically generates the desired three-dimensional catalytic morphology through thermal decomposition and material removal.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The sensor achieves high sensitivity and fast response in detecting ultra-trace hydrogen levels with reduced power consumption by enhancing surface area and reaction efficiency, improving detection performance.

Implementation Method 1

a sensor part (10) including a first film (11)

Methodology Applied
Scientific EffectAdsorption: Adsorption

Implementation Method 2

a second region (11b) including a plurality of protrusions (p1). A protruding direction of the plurality of protrusions (p1) is along a first direction from the first region (11a) toward the second region (11b)

Methodology Applied
Scientific EffectSurface area effect:

Implementation Method 3

The first element includes at least one selected from the group consisting of Pd, Pt, and Au

Methodology Applied
Scientific EffectCatalysis: Catalysis

Data Source

PatentUS11808726B2Sensor and method for manufacturing the same
Publication Date: 2023.11.07 KK TOSHIBA
  • US11808726B2 patent drawing
  • US11808726B2 patent drawing
  • US11808726B2 patent drawing

AI summary

According to one embodiment, a sensor includes a sensor part including a first film. The first film includes a first element including at least one selected from the group consisting of Pd, Pt, and Au. The first film includes a first region, and a second region including a plurality of protrusions. A protruding direction of the protrusions is along a first direction from the first region toward the second region.