Hydrogen Supplementation for OLED Array Substrates
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Solution Overview
Problem
OLED display devices suffer from uneven light emission due to structural uniformity issues in low-temperature polysilicon active layers, leading to light and dark mura at different positions, which are exacerbated by hydrogen supplementation treatments that increase current differences between thin film transistors.
Innovation Solution
A method for manufacturing an array substrate involving the formation of pixel structures with specific thin film transistors, where hydrogen supplementation is performed differently for each type of transistor by creating holes in the insulating layers to control hydrogen ion concentration, thereby reducing current differences and enhancing electron mobility.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If hydrogen supplementation treatment is performed on all thin film transistors uniformly, then the active layer structural uniformity is improved, but the current differences between transistors increase leading to light and dark mura
Solution Approach 1:
The patent applies different hydrogen supplementation treatments to different transistor types based on their specific characteristics. Driving transistors receive one treatment regimen while switch transistors receive another, allowing each to achieve optimal structural uniformity without causing current imbalances. This local differentiation resolves the contradiction by tailoring the treatment to local needs rather than applying a uniform approach.
Solution Approach 2:
The patent changes the hydrogen supplementation parameters (such as treatment time, temperature, or hydrogen concentration) depending on the transistor type. By adjusting these parameters locally for driving versus switch transistors, the method achieves improved structural uniformity while maintaining current uniformity across different transistor positions.
2Productivity
If low-temperature polysilicon is used in active layers, then the manufacturing process is simplified and productivity is improved, but structural uniformity deteriorates causing mura defects
Solution Approach 1:
The patent applies hydrogen supplementation treatment as a preliminary action after forming the low-temperature polysilicon active layer. This treatment pre-repairs structural defects and uniformity issues before the transistors are assembled into the final device, allowing the use of simplified low-temperature processing while achieving the structural uniformity that would otherwise require more complex high-temperature processes.
Solution Approach 2:
The patent changes the physical or chemical parameters of the active layer through hydrogen supplementation, transforming the structural properties of low-temperature polysilicon to achieve uniformity comparable to or better than high-temperature processes, thereby maintaining productivity while improving quality.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach ensures uniform light emission by reducing current differences and increasing electron mobility, minimizing the occurrence of mura in OLED display devices.
Implementation Method 1
at least one insulating layer configured to release hydrogen ions to an active layer
Data Source
AI summary
The present disclosure provides a method for manufacturing an array substrate, an array substrate, and a display device. By first forming holes in a first thin film transistor, then simultaneously performing hydrogen supplementation on the first thin film transistor and a second thin film transistor, and then forming holes in the second thin film transistor, the first thin film transistor and the second thin film transistor can be repaired and compensated in different degrees by hydrogen supplementation.