Hydrogenated Silicon–Silver–Silicon Dioxide Filters for Single Sputtering
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Solution Overview
Problem
Existing optical filters face challenges in achieving optimal optical performance, manufacturability, and miniaturization due to reactivity issues between materials like silver and oxides, leading to high costs and inefficiencies in deposition processes.
Innovation Solution
The use of hydrogenated silicon and silicon dioxide layers, combined with silver, in an optical filter structure, which allows for a single sputtering process to reduce reactivity and improve optical performance, reducing angle shift and increasing transmissivity, while enabling miniaturization and cost-effectiveness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional optical filter materials (silver and oxides) are used, then optical performance can be achieved, but reactivity issues between materials cause manufacturing complexity and cost increases
Solution Approach 1:
The patent introduces hydrogenated silicon as an intermediary layer between silver and oxide layers. This intermediary material reduces the reactivity between silver and oxides, allowing the optical filter to maintain its performance while simplifying the deposition process and reducing manufacturing complexity.
Solution Approach 2:
The patent employs a composite material structure consisting of hydrogenated silicon, silver, and oxide layers. This composite approach leverages the beneficial properties of each material while mitigating their individual drawbacks, particularly the reactivity issues between silver and oxides, thereby achieving both optical performance and manufacturing efficiency.
2Reliability
If multiple deposition processes are used to address material reactivity, then optical performance improves, but manufacturing cost and time increase
Solution Approach 1:
The patent merges multiple deposition processes into a single sputtering process. By incorporating hydrogenated silicon, silver, and oxide layers that can be deposited together, the patent eliminates the need for separate deposition steps, thereby maintaining optical performance while significantly improving manufacturing efficiency and reducing costs.
3Adaptability or versatility
If conventional optical filter designs are used, then functionality is maintained, but device size cannot be miniaturized
Solution Approach 1:
The patent utilizes parameter changes in the material composition and layer structure to achieve miniaturization. By optimizing the thickness and composition of the hydrogenated silicon, silver, and oxide layers, the patent maintains the functional capability of the optical filter while reducing its overall size, enabling miniaturization for compact optical systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration achieves improved optical performance with reduced angle shift and increased transmissivity, facilitating cost-effective and efficient manufacturing of optical filters, suitable for applications such as gesture recognition and health monitoring systems.
Implementation Method 1
a first subset of optical filter layers include a first material with a first refractive index... a second subset of optical filter layers include a second material with a second refractive index
Implementation Method 2
depositing a first subset of optical filter layers of the optical filter... depositing a second subset of optical filter layers of the optical filter
Data Source
AI summary
An induced transmission filter may include a set of optical filter layers. The set of optical filter layers may include a first subset of optical filter layers comprising a first material with a first refractive index, the first material comprising at least silicon and hydrogen. The set of optical filter layers may include a second subset of optical filter layers comprising a second material with a second refractive index. The second material may be different from the first material and the second refractive index may be less than the first refractive index. The second material may include at least silver.