Hydrophobic Coated Abrasive Articles for CMP Defect Reduction
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Solution Overview
Problem
Diamond abrasive particles or coatings in polishing systems can fracture, releasing fragments that embed in polishing pads and cause substrate defects during chemical mechanical planarization (CMP) processes, leading to reduced wafer yield.
Innovation Solution
Development of abrasive articles with a hydrophobic exterior surface, featuring a conformable hydrophobic layer including diamond-like glass, which allows diamond fragments to float and be removed from the polishing system, reducing the risk of embedding in the polishing pad.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If diamond abrasive particles or coatings are used in polishing systems, then high hardness and chemical resistance are achieved, but diamond fragments can fracture and embed in polishing pads causing substrate defects
Solution Approach 1:
The patent applies the 'Blessing in disguise' principle by converting the harmful effect of diamond fragments (which cause substrate defects) into a beneficial effect. The hydrophobic coating with contact angle ≥110 degrees causes diamond fragments to be repelled and float on the polishing pad surface rather than embedding, thereby transforming the harm of fragment generation into a benefit where fragments are automatically removed without compromising the polishing function.
Solution Approach 2:
The patent applies the 'Parameter changes' principle by modifying the surface energy characteristics of the polishing pad through a hydrophobic coating. The contact angle parameter is specifically engineered to be ≥110 degrees, which fundamentally changes the interaction between diamond fragments and the pad surface from embedding to floating/repulsion, thereby eliminating substrate defects while maintaining polishing performance.
2Reliability
If diamond abrasive based pad conditioners are used to abrade the polishing pad, then consistent polishing performance is maintained, but diamond fragments are released into the polishing system
Solution Approach 1:
The hydrophobic coating converts the harmful presence of diamond fragments into a beneficial self-cleaning mechanism. As the pad conditioner abrades the polishing pad to maintain consistent performance, any released diamond fragments are immediately repelled by the hydrophobic surface and float on top, preventing contamination while allowing continuous effective conditioning.
Solution Approach 2:
The hydrophobic coating acts as an intermediary layer between the diamond abrasive particles and the polishing pad substrate. This intermediate layer with contact angle ≥110 degrees prevents direct embedding of fragments while allowing the abrasive action to proceed, thus mediating between the need for effective conditioning and the prevention of contamination.
3Object-affected harmful factors
If a hydrophobic coating with contact angle greater than 110 degrees is applied to the abrasive article, then diamond fragments float and are removed from the system, but the complexity of the abrasive article increases
Solution Approach 1:
The patent applies the 'Flexible shells and thin films' principle by using a thin hydrophobic coating layer on the abrasive article surface. This thin film structure adds minimal complexity while effectively providing the hydrophobic function with contact angle ≥110 degrees, allowing diamond fragments to float and be removed without significantly increasing the overall device complexity.
Solution Approach 2:
The abrasive article becomes a composite structure combining the abrasive layer with a hydrophobic coating layer. This composite material approach integrates the fragment-repelling function directly into the abrasive article structure, minimizing additional complexity while achieving the desired effect of preventing substrate defects.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The hydrophobic coating effectively suspends and removes diamond fragments, minimizing substrate defects and maintaining consistent polishing performance over extended periods.
Implementation Method 1
The conformable hydrophobic layer includes diamond like glass and forms the hydrophobic exterior surface and the contact angle of the hydrophobic exterior surface is greater than 110 degrees. The hydrophobic coating enable diamond fragments that may be released from the abrasive article to float or be suspended in, for example, the aqueous based slurry of the polishing system.
Data Source
AI summary
The present disclosure relates to abrasive articles including conformable coatings, e.g. a hydrophobic coating, methods of making and polishing systems therefrom. The present disclosure provides an abrasive layer, having a hydrophobic exterior surface, including at least one of (i) a plurality of individual diamond particles and (ii) a plurality of engineered features having a conformable diamond layer and; a conformable hydrophobic layer in contact with and at least partially coating at least one of the plurality of individual diamond particles and the conformable diamond layer and, wherein the conformable hydrophobic layer includes diamond like glass and forms the hydrophobic exterior surface and the contact angle of the hydrophobic exterior surface is greater than 110 degrees.