Hydrophobic Coating for Semiconductor Die Cooling

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Solution Overview

Problem

Conventional cooling methods for semiconductor die become less effective as they generate more heat in smaller spatial volumes, leading to increased temperatures that can damage components and affect data integrity.

Innovation Solution

A hydrophobic coating is applied to semiconductor die and electrical contact elements, allowing for efficient heat transfer to a cooling fluid, which is then directed through a chamber to prevent hot spots and minimize temperature fluctuations in 3D chip stacks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Speed

If semiconductor die are made smaller to increase performance, then data speed increases, but heat generation increases in smaller spatial volumes

Engineering Contradiction:
Improvedata speedVSAvoidheat generation
Core Design Contradiction:
SpeedVSTemperature

Solution Approach 1:

A hydrophobic coating is applied as an intermediary layer between the semiconductor die and cooling fluid. This coating enables efficient thermal conduction while preventing electrical shorts, allowing heat to be transferred to the cooling fluid without compromising electrical integrity. The coating resolves the contradiction by providing a thermal pathway that doesn't interfere with the miniaturized semiconductor structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention changes the physical and chemical parameters of the surface by applying a hydrophobic coating with specific thermal conductivity and water contact angle properties. This parameter change allows the surface to simultaneously conduct heat effectively and repel cooling fluid, enabling efficient thermal management in smaller spatial volumes without increasing temperature.

Inventive Principle:
Principle #35Parameter changes

2Temperature

If conventional cooling methods are used, then cooling is provided, but effectiveness decreases as heat generation increases in reduced spatial volumes

Engineering Contradiction:
Improvecooling effectivenessVSAvoidspatial volume
Core Design Contradiction:
TemperatureVSVolume of stationary object

Solution Approach 1:

The hydrophobic coating provides localized thermal management quality on the semiconductor die surface. By treating the surface with specific hydrophobic properties, the coating enables efficient heat transfer at the local level where it is most needed, directly at the heat-generating semiconductor components, without requiring increased overall system volume.

Inventive Principle:
Principle #3Local quality

3Temperature

If temperature thresholds are exceeded, then heat removal is achieved, but material alteration and electrical characteristic changes occur

Engineering Contradiction:
Improveheat removalVSAvoidmaterial integrity
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The hydrophobic coating serves as a protective intermediary that enables heat removal while preventing direct contact between the cooling fluid and electrical components. This mediation allows temperature to be controlled without exceeding material thresholds, preserving electrical characteristics and preventing power leakage in transistors and data integrity issues in memory cells.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Quantity of substance

If dense interconnection circuitry is used to package smaller semiconductor die, then packaging density increases, but heat removal becomes more difficult

Engineering Contradiction:
Improvepackaging densityVSAvoidheat removal difficulty
Core Design Contradiction:
Quantity of substanceVSTemperature

Solution Approach 1:

The hydrophobic coating provides a thermal pathway through the dense interconnection circuitry packaging. By applying the coating directly to the semiconductor die, heat can be conducted away from the densely packed components without requiring additional cooling infrastructure that would increase packaging volume.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method effectively cools semiconductor die by conducting heat away from the die and preventing electrical shorts, ensuring predictable performance and reducing the risk of cracks due to thermal expansion and contraction.

Implementation Method 1

The hydrophobic coating is selected to transfer heat from the semiconductor die to a cooling fluid

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

applying a hydrophobic coating directly to the semiconductor die, substrate, and electrical contact element

Methodology Applied
Scientific EffectHydrophobic effect: Hydrophobe

Implementation Method 3

flowing a cooling fluid into contact with a hydrophobic coating attached to an exterior of the at least one semiconductor die

Methodology Applied
Scientific EffectConvection: Convection

Data Source

PatentUS9287190B2Devices employing semiconductor die having hydrophobic coatings, and related cooling methods
Publication Date: 2016.03.15 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • US9287190B2 patent drawing
  • US9287190B2 patent drawing
  • US9287190B2 patent drawing

AI summary

Devices employing semiconductor die having hydrophobic coatings, and related cooling methods are disclosed. A device may include at least one semiconductor die electrically coupled to a substrate by electrical contact elements. During operation the semiconductor die and the electrical contact elements generate heat. By applying hydrophobic coatings to the semiconductor die and the electrical contact elements, a cooling fluid may be used to directly cool the semiconductor die and the electrical contact elements to maintain these components within temperature limits and free from electrical shorting and corrosion. In this manner, the semiconductor die and associated electrical contact elements may be cooled to avoid the creation of damaging localized hot spots and temperature-sensitive semiconductor performance issues.