Hyperbaric Sawing for Packaged Devices

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Solution Overview

Problem

As packaged electronic device sizes shrink, 'fly off' events during sawing operations become more frequent, causing damage and increased costs due to the need for tape sawing operations, which are costly and not compatible with all device testing equipment.

Innovation Solution

A process chamber maintaining pressure greater than one atmosphere is used, equipped with a vacuum chuck and a saw that cuts through mold compound and package substrates in saw streets to separate devices, increasing the holding force and reducing fly off events without the need for tape.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional atmospheric pressure sawing is used, then device sizes can be processed, but fly off events occur causing device damage and increased costs

Engineering Contradiction:
Improvedevice integrity during sawingVSAvoidfly off events
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent changes the pressure parameter from atmospheric to hyperbaric (greater than one atmosphere) to prevent device fly off during sawing. This parameter change increases the holding force on devices and eliminates the harmful fly off effect without requiring additional mechanical fixtures or tapes.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If tape sawing operations are used to prevent fly off, then device stability improves, but costs increase substantially and compatibility with testing equipment is limited

Engineering Contradiction:
Improvedevice stability during sawingVSAvoidtape application and removal processes
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent extracts and eliminates the tape fixture from the sawing process by using hyperbaric pressure to provide sufficient holding force directly through the chuck. This removes the complexity of tape application, UV curing, and tape removal processes while maintaining device stability.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The hyperbaric environment provides self-service holding force through pressure differential, eliminating the need for external tape fixtures. The pressure itself serves the function of securing devices during sawing without requiring additional materials or processes.

Inventive Principle:
Principle #25Self-service

3Productivity

If device sizes are reduced to increase density, then manufacturing efficiency improves, but fly off events occur more frequently

Engineering Contradiction:
Improvedevice densityVSAvoiddevice stability during sawing
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The patent uses hyperbaric pressure to compensate for the reduced stability of smaller devices during sawing. The increased pressure provides sufficient holding force even for miniaturized devices, allowing high-density packaging without sacrificing reliability.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The increased pressure in the process chamber effectively prevents device fly off during sawing, reducing damage and costs associated with tape sawing operations, while ensuring compatibility with various device testing equipment.

Implementation Method 1

a process chamber configured for a pressure greater than one atmosphere, having a device chuck configured to support electronic devices

Methodology Applied
Scientific EffectPressure: Pressure Increase

Implementation Method 2

a saw in the process chamber configured to cut through the mold compound and package substrates

Methodology Applied
Scientific EffectVacuum: Vacuum

Data Source

PatentUS11676829B2Hyperbaric saw for sawing packaged devices
Publication Date: 2023.06.13 TEXAS INSTRUMENTS INC
  • US11676829B2 patent drawing
  • US11676829B2 patent drawing
  • US11676829B2 patent drawing

AI summary

In a described example, an apparatus includes: a process chamber configured for a pressure greater than one atmosphere, having a device chuck configured to support electronic devices that are mounted on package substrates and partially covered in mold compound, the electronic devices spaced from one another by saw streets; and a saw in the process chamber configured to cut through the mold compound and package substrates in the saw streets to separate the molded electronic devices one from another.