Automated Design Rule Generation for IC Manufacturing
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Solution Overview
Problem
The miniaturization of integrated circuits (ICs) has led to increasingly complex design and manufacturing specifications, making it challenging to efficiently generate and verify design rules for semiconductor devices, which can result in errors and inefficiencies in the IC device design and manufacturing process.
Innovation Solution
A method is introduced that involves specifying a set of criteria corresponding to an IC manufacturing process, applying a design rule instruction to automatically generate a design rule, and creating a design rule manual (DRM) file, which enables the efficient generation and management of design rules, reducing error-related activities and improving the IC device design and manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If automated design rule generation is implemented, then productivity and error reduction are improved, but device complexity increases due to the need for sophisticated EDA tools and processing systems
Solution Approach 1:
The system enables self-service by allowing the EDA tool to automatically generate design rules from manufacturing process data without requiring manual intervention from design engineers. The processor automatically retrieves process data, applies processing rules, and generates design rules independently, reducing human labor while maintaining high complexity through automated intelligence.
2Reliability
If manual design rule verification is performed, then device complexity remains low, but productivity decreases and error rates increase
Solution Approach 1:
The system implements feedback mechanisms where the EDA tool automatically verifies generated design rules against manufacturing process data and provides feedback for iterative refinement. The processor compares generated rules with actual process outcomes and adjusts parameters accordingly, ensuring high reliability through continuous validation while maintaining fast automated processing speeds.
3Manufacturing precision
If detailed design rule specifications are created, then manufacturing precision is improved, but the time required for design rule creation increases
Solution Approach 1:
The system performs preliminary action by pre-retrieving and organizing manufacturing process data before design rule generation. The processor prepares process parameters, material properties, and equipment specifications in advance, so that when design rules need to be created, all necessary information is already structured and ready for rapid processing, achieving both detail and speed.
4Productivity
If automated processing is used for design rule generation, then productivity increases, but measurement precision may be compromised due to automation limitations
Solution Approach 1:
The EDA tool serves as an intermediary between automated processing and precision requirements. It translates automated processor outputs into verified design rules by applying domain-specific knowledge, validation algorithms, and expert rule sets. This intermediary layer ensures that automated high-throughput processing maintains measurement precision through multiple layers of verification and validation.
Data Source
AI summary
A method of designing an integrated circuit (IC) device includes generating, using a processor, a design rule instruction macro including one or more of classifying a design rule based on a design rule type, classifying a design rule based on a design rule category, or generating a definition of a derived layer. The method includes using the processor to identify a set of criteria corresponding to an IC manufacturing process, generate a design rule by applying the design rule instruction macro to define relationships within the set of criteria whereby one or more constraints of the design rule are directed to the set of criteria and assigning conditions whereby the one or more constraints of the design rule are selectively directed to the set of criteria, and store the design rule in a storage medium.