Integrated Circuit Heat Point Depth Detection via Frequency Phase Shift
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Solution Overview
Problem
Conventional methods for detecting the depth of a heat generation point in integrated circuits face challenges due to position dependency of phase shift, which is affected by heat generation amount, structure, and position, leading to inaccurate results due to temperature rise and varying heat transfer coefficients.
Innovation Solution
A method involving stabilization of the integrated circuit's surface temperature and the use of periodic electric signals at different frequencies to acquire detection signals, allowing for the calculation of depth information independent of the heat generation point's position, using a device with an electric signal supply unit, control unit, detection unit, calculation unit, and temperature stabilization unit.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional phase shift detection method is used to determine defect depth, then depth information can be obtained, but measurement precision deteriorates due to position dependency of phase shift offset component
Solution Approach 1:
The patent changes the parameter of excitation frequency by applying periodic pulse voltages at multiple different frequencies. By measuring phase shifts at multiple frequencies and analyzing their relationships, the method eliminates the position-dependent offset component that plagues single-frequency measurements, thereby achieving accurate depth detection independent of defect position.
Solution Approach 2:
The patent uses feedback by measuring phase shifts at multiple frequencies and using these measurements to calculate and eliminate the offset component. The system feeds back the phase shift information from multiple frequency measurements to determine the correct depth, compensating for position-dependent errors that would otherwise corrupt the measurement.
2Measurement precision
If periodic pulse voltage is applied to detect thermal response, then depth information can be obtained, but temperature rise causes error in phase shift detection
Solution Approach 1:
The patent applies periodic pulse voltages at multiple different frequencies to excite thermal responses. By using multiple periodic excitations at varying frequencies, the system can distinguish between the periodic thermal response and the non-periodic temperature rise trend, enabling accurate phase shift measurement despite continuous heating.
Solution Approach 2:
The patent changes the frequency parameter of the excitation signal across multiple measurements. By analyzing phase shifts at different frequencies, the method can separate the position-dependent offset component from the depth-related phase shift, eliminating temperature rise errors that affect single-frequency measurements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and stable detection of the heat generation point depth, independent of its position, by stabilizing the surface temperature and using frequency-dependent thermal responses to eliminate position-dependent errors.
Implementation Method 1
a first step of stabilizing an average temperature of a surface of the integrated circuit; a second step of supplying a periodic electric signal fluctuating at a first frequency, to the integrated circuit and acquiring a first detection signal indicative of a change of an amount of heat generation detected from the integrated circuit in response thereto
Implementation Method 2
a phase shift ΔΦ between electrical excitation and a local thermal response is detected and a depth of a defect is determined from the phase shift ΔΦ
Data Source
AI summary
A heat generation point detection method comprises: step of stabilizing an average temperature of a surface of an integrated circuit S; steps of applying a bias voltage of a low frequency to the integrated circuit S and acquiring a heat generation detection signal detected from the integrated circuit S in response thereto; steps of supplying a bias voltage of a high frequency and acquiring a heat generation detection signal detected in response thereto; steps of detecting a phase shift between the bias voltage of the low frequency and the heat generation detection signal and a phase shift between the bias voltage of the high frequency and the heat generation detection signal; and step of calculating a change rate of the phase shift against a square root of the frequency of the bias voltage, and obtaining depth information of the heat generation point from the change rate.