Integrated Circuit Heat Generation Point Depth Detection
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Solution Overview
Problem
Conventional methods for detecting the depth of a heat generation point in integrated circuits are prone to errors due to variations in heat generation and heat capacity, which depend on the amplitude of the excitation signal and the position of the defect point, leading to inaccurate depth evaluations.
Innovation Solution
A method involving the application of periodic electric signals at different frequencies to detect phase shifts and calculate a change rate of phase shifts, allowing for the accurate determination of depth information independent of the heat generation condition and position, using a device with units for signal supply, phase shift detection, and calculation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a single frequency periodic pulse voltage is applied to detect phase shift for determining defect depth, then the detection method is simple, but the measurement precision deteriorates due to errors from variations in heat generation and heat capacity
Solution Approach 1:
The patent applies periodic pulse voltages at multiple different frequencies to the integrated circuit. By measuring phase shifts at each frequency and analyzing the relationship between frequency and phase shift, the system determines defect depth more accurately. This periodic action at varying frequencies allows differentiation between phase shifts caused by depth versus those caused by heat capacity variations, thereby resolving the technical contradiction between measurement precision and device complexity.
2Reliability
If phase shift is used to evaluate defect depth, then the detection method is straightforward, but the reliability deteriorates because phase shift depends on multiple factors including heat generation amount, circuit structure, and defect position
Solution Approach 1:
The patent changes the frequency parameter of the applied periodic pulse voltage and measures phase shifts at each frequency. By analyzing how phase shift varies with frequency, the system can isolate the depth component from other influencing factors such as heat generation amount and circuit structure. This parameter change approach transforms a multi-factor dependent measurement into a depth-specific measurement, improving reliability while managing measurement complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables precise detection of the depth of heat generation points in integrated circuits, independent of the heat generation condition and position, by canceling out offset components and utilizing the change rate of phase shifts against frequency variables.
Implementation Method 1
a first step of supplying a periodic electric signal fluctuating at a first frequency, to the integrated circuit and acquiring a first detection signal indicative of a change of an amount of heat generation detected from the integrated circuit in response thereto
Data Source
AI summary
A heat generation point detection method comprises steps S01, S02 of applying a low frequency bias voltage to an integrated circuit S and acquiring a heat generation detection signal detected from the integrated circuit S in response thereto, steps S03, S04 of supplying a high frequency bias voltage to the integrated circuit S and acquiring a heat generation detection signal detected from the integrated circuit S in response thereto, steps S05 to S07 of detecting a phase shift between the low frequency bias voltage and the heat generation detection signal and a phase shift between the high frequency bias voltage and the heat generation detection signal, and a step S08 of calculating a change rate of the phase shift against a square root of the frequency of the bias voltage, based on those phase shifts, and acquiring depth information of a heat generation point from the change rate.